Efficient elastic imaging of single atoms on ultrathin supports in a scanning transmission electron microscope

Ultramicroscopy

Volumn 123, Issue , 2012, Pages 59-65

  Hovden, Robert ^a   Muller, David A ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

Aberration correction; High angle annular dark field; Imaging DNA; Low angle annular dark field; Scanning transmission electron microscope

Indexed keywords

ABERRATION CORRECTION; BRIGHT FIELDS; CONVENTIONAL TEM; DARK FIELD; DETECTION EFFICIENCY; DETECTOR GEOMETRY; DIFFRACTION EFFECTS; DOSE LIMITS; ELASTIC IMAGING; HIGH-ANGLE ANNULAR DARK FIELDS; INTERPRETABILITY; LIGHT ATOMS; QUANTUM MECHANICAL SIMULATIONS; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SIGNAL TO NOISE; SINGLE ATOMS; TRANSMISSION ELECTRON MICROSCOPE; ULTRA-THIN;

ADENOSINETRIPHOSPHATE; GRAPHENE; LIGHT TRANSMISSION; QUANTUM THEORY; STRONTIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

ATOMS;

ADENOSINE TRIPHOSPHATE; GRAPHENE; GRAPHITE;

ARTICLE; ATOM; BRIGHT FIELD MICROSCOPY; DARK FIELD MICROSCOPE; GEOMETRY; HIGH ANGLE ANNULAR DARK FIELD; IMAGE ANALYSIS; LOW ANGLE ANNULAR DARK FIELD; MECHANICAL STIMULATION; MOLECULAR IMAGING; QUANTITATIVE ANALYSIS; QUANTUM MECHANICS; SCANNING ELECTRON MICROSCOPE; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SIGNAL NOISE RATIO; TRANSMISSION ELECTRON MICROSCOPY; CHEMISTRY; EQUIPMENT; METHODOLOGY; QUANTUM THEORY; ELASTICITY; IMAGE PROCESSING; SIGNAL DETECTION; SIMULATION;

ADENOSINE TRIPHOSPHATE; GRAPHITE; MICROSCOPY, ELECTRON, SCANNING TRANSMISSION; QUANTUM THEORY;

EID: 84870430193     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2012.04.014     Document Type: Article

References (48)

1. Pantelic R.S., et al. Graphene: substrate preparation and introduction. Journal of Structural Biology 2011, 174(1):234-238.
2. Huang P.Y., et al. Grains and grain boundaries in single-layer graphene atomic patchwork quilts. Nature 2011, 469(7330):389-392.
3. Meyer J.C., Kisielowski C., Erni R., Rossell M.D., Crommie M.F., Zettl A. Direct imaging of lattice atoms and topological defects in graphene membranes. Nano Letters 2008, 8(11):3582-3586.
4. Krivanek O.L., et al. Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy. Nature 2010, 464(7288):571-574.
5. Haider M., Uhlemann S., Schwan E., Rose H., Kabius B., Urban K. Electron microscopy image enhanced. Nature 1998, 392(6678):768-769.
6. Crewe A.V., Wall J., Langmore J. Visibility of single atoms. Science 1970, 168(3937):1338-1340.
7. Langmore J.P., Wall J. The collection of scattered electrons in dark field electron microscopy. Optik 1973, 38(4):335-350.
8. Wall J., Langmore J., Isaacson M., Crewe A.V. Scanning transmission electron microscopy at high resolution. Proceedings of the National Academy of Sciences 1974, 71(1):1-5.
9. Zeitler E., Thomson M. Scanning transmission electron microscopy.1. Optik 1970, 31(3):258.
10. Zeitler E., Thomson M. Scanning transmission electron microscopy.2. Optik 1970, 31(4):359.
11. Rose H. Nonstandard imaging methods in electron microscopy. Ultramicroscopy 1976, 2:251-267.
12. Treacy M.M.J., Howie A. Contrast effects in the transmission electron microscopy of supported crystalline catalyst particles. Journal of Catalysis 1980, 63(1):265-269.
13. Ohtsuki M., Isaacson M.S., Crewe A.V. Dark field imaging of biological macromolecules with the scanning transmission electron microscope. Proceedings of the National Academy of Sciences of the United States of America 1979, 76(3):1228-1232.
14. Isaacson M. Electron beam induced damage of organic solids: implications for analytical electron microscopy. Ultramicroscopy 1979, 4(2):193-199.
15. Henderson R. The potential and limitations of Neutrons, electrons and X-Rays for atomic resolution microscopy of unstained biological molecules. Quarterly Reviews of Biophysics 1995, 28(2):171-193.
16. Hammel M., Rose H. Resolution and optimum conditions for dark-field STEM and CTEM imaging. Ultramicroscopy 1993, 49(1-4):81-86.
17. Rose H., Fertig J. Influence of detector geometry on image properties of the stem for thick objects. Ultramicroscopy 1976, 2:77-87.
18. Treacy M.M.J., Howie A., Wilson C.J. Z contrast of platinum and palladium. Philosophical Magazine A 1978, 38(5):569-585.
19. Howie A. Image-contrast and localized signal selection techniques. Journal of Microscopy 1979, 117:11-23.
20. M.M.J. Treacy and J.M.Gibson, On the Detection of Point-Defects in Crystals Using High-Angle Diffuse-scattering in the STEM, Institute of Physics Conference Series, 61, pp. 263-266.
21. Hartel P. Conditions and reasons for incoherent imaging in STEM. Ultramicroscopy 1996, 63(2):93-114.
22. Rez P. Comparison of phase contrast transmission electron microscopy with optimized scanning transmission annular dark field imaging for protein imaging. Ultramicroscopy 2003, 96(1):117-124.
23. Colliex C., Jeanguillaume C., Mory C. Unconventional modes for STEM imaging of biological structures. Journal of Ultrastructure Research 1984, 88(2):177-206.
24. Muller D.A., Edwards B., Kirkland E.J., Silcox J. Simulation of thermal diffuse scattering including a detailed phonon dispersion curve. Ultramicroscopy 2001, 86(3-4):371-380.
25. LeBeau J.M., Findlay S.D., Wang X., Jacobson A.J., Allen L.J., Stemmer S. High-angle scattering of fast electrons from crystals containing heavy elements: simulation and experiment. Physical Review B 2009, 79(21):214110.
26. Kirkland E.J. Advanced Computing in Electron Microscopy 2010, Springer.
27. Kirkland E.J., Loane R.F., Silcox J. Simulation of annular dark field stem images using a modified multislice method. Ultramicroscopy 1987, 23(1):77-96.
28. Henderson R. The potential and limitations of neutrons, electrons and X-rays for atomic resolution microscopy of unstained biological molecules. Quarterly Reviews of Biophysics 1995, 28(2):171-193.
29. Cosslett V.E. Possibilities and limitations for the differentiation of elements in the electron microscope. Laboratory Investigation; a Journal of Technical Methods and Pathology 1965, 14:1009-1019.
30. LeBeau J.M., Findlay S.D., Allen L.J., Stemmer S. Quantitative atomic resolution scanning transmission electron microscopy. Physical Review Letters 2008, 100(20):206101.
31. LeBeau J.M., Findlay S.D., Allen L.J., Stemmer S. Standardless atom counting in scanning transmission electron microscopy. Nano Letters 2010, 10(11):4405-4408.
32. Voyles P.M., Muller D.A., Grazul J.L., Citrin P.H., Gossmann H.-J.L. Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si. Nature 2002, 416(6883):826-829.
33. Yu Z. Study of strain fields at a-Si/c-Si interface. Journal of Applied Physics 2004, 95(7):3362.
34. L. Fitting, S. Thiel, A. Schmehl, J. Mannhart, and D.A. Muller, Subtleties in ADF Imaging and Spatially Resolved EELS: A Case Study of Low-Angle Twist Boundaries in SrTiO3,Ultramicroscopy,106,11-12 pp. 1053-1061, October.
35. Ercius P., Weyland M., Muller D.A., Gignac L.M. Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography. Applied Physics Letters 2006, 88(24):243116.
36. Treacy M.M.J. Z Dependence of Electron Scattering by Single Atoms. Microscopy and Microanalysis, 2011, 17(6):847-858.
37. Rose H., Fertig J. Influence of detector geometry on image properties of the stem for thick objects. Ultramicroscopy 1976, 2:77-87.
38. Ercius P. Three-Dimensional Electron Tomography of Integrated Circuit Devices 2009, Cornell University.
39. Findlay S.D., et al. Robust atomic resolution imaging of light elements using scanning transmission electron microscopy. Applied Physics Letters 2009, 95(19):191913.
40. Sader K., Brown A., Brydson R., Bleloch A. Quantitative analysis of image contrast in phase contrast STEM for low dose imaging. Ultramicroscopy 2010, 110(10):1324-1331.
41. Jia C.-L., Lentzen, Urban K. High-resolution transmission electron microscopy using negative spherical aberration. Microscopy and Microanalysis 2004, 10(2):174-184.
42. Cowley J.M. Scanning transmission electron microscopy of thin specimens. Ultramicroscopy 1976, 2:3-16.
43. Kirkland E.J. On the Optimum Probe in Aberration Corrected ADF-STEM. Ultramicroscopy, 2011, 111(11):1523-1530.
44. Libera M.R., Egerton R.F. Advances in the transmission electron microscopy of polymers. Polymer Reviews 2010, 50(3):321.
45. Shannon C.E. A mathematical theory of communication. Bell System Technical Journal 1948, 27(379-423):623-656.
46. Drummy L.F., Yang J., Martin D.C.D.C. Low-voltage electron microscopy of polymer and organic molecular thin films. Ultramicroscopy 2004, 99(4):247-256.
47. Isaacson M. Interaction of 25keV electrons with the Nucleic acid bases, adenine, thymine, and uracil. II. Inner shell excitation and inelastic scattering cross sections. The Journal of Chemical Physics 1972, 56(5):1813.
48. Krivanek O.L., Mory C., Tence M., Colliex C. EELS quantification near the single-atom detection level. Microscopy Microanalysis Microstructures 1991, 2(2-3):11.