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Volumn 18, Issue 11, 2012, Pages 1807-1814

Study of black silicon obtained by cryogenic plasma etching: Approach to achieve the hot spot of a thermoelectric energy harvester

Author keywords

[No Author keywords available]

Indexed keywords

BLACK SILICON; CONICAL MICROSTRUCTURES; CRYOGENIC PLASMA; CRYOGENIC TEMPERATURES; ENHANCED ABSORPTION; HOT SPOT; INCIDENT ANGLES; INDUCTIVELY-COUPLED; INTEGRATING SPHERES; ION ETCHING; ITS EFFICIENCIES; OPTICAL REFLECTANCE; OPTICAL WAVELENGTH; PHOTO-THERMAL; RESISTANCE TEMPERATURE DETECTORS; SILICON SURFACES; THERMOELECTRIC ENERGY;

EID: 84870251695     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1486-0     Document Type: Conference Paper
Times cited : (27)

References (26)
  • 1
    • 0020829271 scopus 로고
    • Materials for photothermal solar energy conversion
    • doi:10.1007/BF00700767
    • Bogaerts WF, Lampert CM (1983) Materials for photothermal solar energy conversion. J Mater Sci 18(10):2847-2875. doi:10.1007/BF00700767
    • (1983) J Mater Sci , vol.18 , Issue.10 , pp. 2847-2875
    • Bogaerts, W.F.1    Lampert, C.M.2
  • 2
    • 0021520611 scopus 로고
    • A two-dimensional model for polycrystalline silicon solar cells
    • doi:10.1016/0379-6787(84)90090-5
    • Böhm M, Scheer HC, Wagemann HG (1984) A two-dimensional model for polycrystalline silicon solar cells. Sol Cells 13(1): 29-41. doi:10.1016/0379-6787(84)90090-5
    • (1984) Sol Cells , vol.13 , Issue.1 , pp. 29-41
    • Böhm, M.1    Scheer, H.C.2    Wagemann, H.G.3
  • 3
    • 0018516769 scopus 로고
    • Stabilized CVD amorphous silicon for high temperature photothermal solar energy conversion
    • doi:10.1016/0165-1633(79)90034-0
    • Booth DC, Allred DD, Seraphin BO (1979) Stabilized CVD amorphous silicon for high temperature photothermal solar energy conversion. Sol Energy Mater 2(1):107-124. doi:10.1016/0165-1633(79)90034-0
    • (1979) Sol Energy Mater , vol.2 , Issue.1 , pp. 107-124
    • Booth, D.C.1    Allred, D.D.2    Seraphin, B.O.3
  • 4
    • 67649111365 scopus 로고    scopus 로고
    • Nanostructured black silicon and the optical reflectance of graded-density surfaces
    • art. no 231121, doi: 10.1063/1.3152244
    • Branz HM, Yost VE, Ward S, Jones KM, To B, Stradinset P (2009) Nanostructured black silicon and the optical reflectance of graded-density surfaces Appl Phys Lett 94(23), art. no. 231121. doi: 10.1063/1.3152244
    • (2009) Appl Phys Lett , vol.94 , Issue.23
    • Branz, H.M.1    Yost, V.E.2    Ward, S.3    Jones, K.M.4    To, B.5    Stradinset, P.6
  • 5
    • 58149107547 scopus 로고    scopus 로고
    • Plasmonic solar cells
    • doi:10.1364/OE.16.021793
    • Catchpole KR, Polman A (2008) Plasmonic solar cells. Opt Express 16(26):21793-21800. doi:10.1364/OE.16.021793
    • (2008) Opt Express , vol.16 , Issue.26 , pp. 21793-21800
    • Catchpole, K.R.1    Polman, A.2
  • 7
    • 0036684902 scopus 로고    scopus 로고
    • Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
    • doi:10.1109/JMEMS.2002.800928
    • De Boer MJ, Gardeniers JGE, Jansen HV, Smulders E, Gilde MJ, Roelofs G, Sasserath JN, Elwenspoek M (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. J Microelectromech Syst 11(4):385-401. doi:10.1109/JMEMS.2002.800928
    • (2002) J Microelectromech Syst , vol.11 , Issue.4 , pp. 385-401
    • De Boer, M.J.1    Jge, G.2    Jansen, H.V.3    Smulders, E.4    Gilde, M.J.5    Roelofs, G.6    Sasserath, J.N.7    Elwenspoek, M.8
  • 9
    • 0025258622 scopus 로고
    • 2/Cu-cermet selective absorbers for solar photothermal conversion
    • doi:10.1016/0165-1633(90)90019-W
    • 2/Cu-cermet selective absorbers for solar photothermal conversion. Sol Energy Mater 20(1-2):81-89. doi:10.1016/0165-1633(90)90019-W
    • (1990) Sol Energy Mater , vol.20 , Issue.1-2 , pp. 81-89
    • Garnich, F.1    Sailer, E.2
  • 10
    • 45849153915 scopus 로고    scopus 로고
    • Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication
    • doi:10.1016/j.tsf.2007.12.117
    • Halbwax M, Sarnet T, Delaporte Ph, Sentis M, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S (2008) Micro and nano-structuration of silicon by femtosecond laser: application to silicon photovoltaic cells fabrication. Thin Solid Films 516(20): 6791-6795. doi:10.1016/j.tsf.2007.12.117
    • (2008) Thin Solid Films , vol.516 , Issue.20 , pp. 6791-6795
    • Halbwax, M.1    Sarnet, T.2    Delaporte, Ph.3    Sentis, M.4    Etienne, H.5    Torregrosa, F.6    Vervisch, V.7    Perichaud, I.8    Martinuzzi, S.9
  • 11
    • 70349092226 scopus 로고    scopus 로고
    • Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors
    • doi:10.1116/1.3196790
    • Henry MD, Welch C, Scherer A (2009) Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors. J Vac Sci Technol A 27(5):1211-1216. doi:10.1116/1.3196790
    • (2009) J Vac Sci Technol A , vol.27 , Issue.5 , pp. 1211-1216
    • Henry, M.D.1    Welch, C.2    Scherer, A.3
  • 12
    • 0035452472 scopus 로고    scopus 로고
    • 2-based chemistry with cryogenical wafer cooling and a high density ICP source
    • doi:10.1016/S0026-2692(01)00039-8
    • 2-based chemistry with cryogenical wafer cooling and a high density ICP source. Microelectron J 32(9):769-777. doi:10.1016/S0026- 2692(01)00039-8
    • (2001) Microelectron J , vol.32 , Issue.9 , pp. 769-777
    • Jansen, H.1    De Boer, M.2    Wensink, H.3    Kloeck, B.4    Elwenspoek, M.5
  • 13
    • 33947132590 scopus 로고    scopus 로고
    • 2 coated carbon nanotubes
    • doi:10.1016/j.tsf.2006.10.056
    • 2 coated carbon nanotubes. Thin Solid Films 515(12):5131-5135. doi:10.1016/j.tsf.2006.10.056
    • (2007) Thin Solid Films , vol.515 , Issue.12 , pp. 5131-5135
    • Lee, T.Y.1    Alegaonkar, P.S.2    Yoo, J.B.3
  • 14
    • 33745255128 scopus 로고    scopus 로고
    • Technological process for a new silicon solar cell structure with honeycomb textured front surface
    • doi:10.1016/j.solmat.2006.03.036
    • Manea E, Budianu E, Purica M, Cernica I, Babarada F (2006) Technological process for a new silicon solar cell structure with honeycomb textured front surface. Sol Energy Mater Sol Cells 90(15):2312-2318. doi:10.1016/j.solmat.2006. 03.036
    • (2006) Sol Energy Mater Sol Cells , vol.90 , Issue.15 , pp. 2312-2318
    • Manea, E.1    Budianu, E.2    Purica, M.3    Cernica, I.4    Babarada, F.5
  • 15
    • 22144494719 scopus 로고    scopus 로고
    • Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
    • doi:10.1016/j.mejo.2005.04.039
    • Marty F, Rousseau L, Saadany B, Mercier B, Francais O, Mita Y, Bourouina T (2005) Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectron J 36(7):673-677. doi:10.1016/j.mejo.2005.04.039
    • (2005) Microelectron J , vol.36 , Issue.7 , pp. 673-677
    • Marty, F.1    Rousseau, L.2    Saadany, B.3    Mercier, B.4    Francais, O.5    Mita, Y.6    Bourouina, T.7
  • 17
    • 0035198851 scopus 로고    scopus 로고
    • Advanced cost-effective crystalline silicon solar cell technologies
    • doi:10.1016/S0927-0248(00)00100-8
    • Nijs JF, Szlufcik J, Poortmans J, Sivoththaman S, Mertens RP (2001) Advanced cost-effective crystalline silicon solar cell technologies. Sol Energy Mater Sol Cells 65(1):249-259. doi:10.1016/S0927-0248(00)00100-8
    • (2001) Sol Energy Mater Sol Cells , vol.65 , Issue.1 , pp. 249-259
    • Nijs, J.F.1    Szlufcik, J.2    Poortmans, J.3    Sivoththaman, S.4    Mertens, R.P.5
  • 21
    • 0036777610 scopus 로고    scopus 로고
    • RIE-texturing of multicrystalline silicon solar cells
    • doi:10.1016/S0927-0248(02)00057-0
    • Ruby DS, Zaidi SH, Narayanan S, Damiani BM, Rohatgi A (2002) RIE-texturing of multicrystalline silicon solar cells. Sol Energy Mater Sol Cells 74(1-4):133-137. doi:10.1016/S0927-0248(02)00057-0
    • (2002) Sol Energy Mater Sol Cells , vol.74 , Issue.1-4 , pp. 133-137
    • Ruby, D.S.1    Zaidi, S.H.2    Narayanan, S.3    Damiani, B.M.4    Rohatgi, A.5
  • 22
    • 0043064044 scopus 로고    scopus 로고
    • Solar selective absorbers based on two-dimensional W surface gratings with submicron periods for high-temperature photothermal conversion
    • doi:10.1016/S0927-0248(02)00364-1
    • Sai H, Yugami H, Kanamori Y, Hane K (2003) Solar selective absorbers based on two-dimensional W surface gratings with submicron periods for high-temperature photothermal conversion. Sol Energy Mater Sol Cells 79(1):35-49. doi:10.1016/S0927-0248(02)00364-1
    • (2003) Sol Energy Mater Sol Cells , vol.79 , Issue.1 , pp. 35-49
    • Sai, H.1    Yugami, H.2    Kanamori, Y.3    Hane, K.4
  • 23
    • 78650714902 scopus 로고    scopus 로고
    • Non-reflecting silicon and polymer surfaces by plasma etching and replication
    • doi:10.1002/adma.201001810
    • Sainiemi L, Jokinen V, Shah A, Shpak M, Aura S, Suvanto P, Franssila S (2011) Non-reflecting silicon and polymer surfaces by plasma etching and replication. Adv Mater 23(1):122-126. doi:10.1002/adma.201001810
    • (2011) Adv Mater , vol.23 , Issue.1 , pp. 122-126
    • Sainiemi, L.1    Jokinen, V.2    Shah, A.3    Shpak, M.4    Aura, S.5    Suvanto, P.6    Franssila, S.7
  • 24
    • 12844278863 scopus 로고    scopus 로고
    • Femtosecond laserinduced formation of submicrometer spikes on silicon in water
    • doi:10.1063/1.1828575
    • Shen MY, Crouch CH, Carey JE, Mazur E (2004) Femtosecond laserinduced formation of submicrometer spikes on silicon in water. Appl Phys Lett 85(23):5694-5696. doi:10.1063/1.1828575
    • (2004) Appl Phys Lett , vol.85 , Issue.23 , pp. 5694-5696
    • Shen, M.Y.1    Crouch, C.H.2    Carey, J.E.3    Mazur, E.4
  • 26
    • 67349229272 scopus 로고    scopus 로고
    • Black surface structures for crystalline silicon solar cells
    • doi: 10.1016/j.mseb.2008.10.019
    • Yoo J, Yu G, Yi J (2009) Black surface structures for crystalline silicon solar cells. Mater Sci Eng B Solid State Mater Adv Technol 159-160(C):333-337. doi: 10.1016/j.mseb.2008.10.019
    • (2009) Mater Sci Eng B Solid State Mater Adv Technol , vol.159-160 , Issue.C , pp. 333-337
    • Yoo, J.1    Yu, G.2    Yi, J.3


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