Black silicon with sub-percent reflectivity: Influence of the 3D texturization geometry

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 354-357

  Nguyen, K N ^a   Abi Saab, D ^a   Basset, P ^a   Richalot, E ^a   Marty, F ^a   Angelescu, D ^a   Leprince Wang, Y ^b   Bourouina, T ^a  

^a National Centre of Scientific Research   (France)

^b UNIVERSITÉ PARIS EST   (France)

Author keywords

Black silicon; Cryogenic DRIE; light absorbing surface

Indexed keywords

BLACK SILICON; CRYOGENIC DRIE; CRYOGENIC TEMPERATURES; DEEP REACTIVE ION ETCHING; LIGHT ABSORBING SURFACE; MASK LESS; OPTICAL REFLECTANCE; OPTICAL WAVELENGTH; PROCESS PARAMETERS; SILICON SURFACES; SIMULATION RESULT; TEXTURIZATION; THREE DIMENSIONAL GEOMETRY;

ACTUATORS; CRYOGENICS; MICROSYSTEMS; REACTIVE ION ETCHING; REFLECTION; THREE DIMENSIONAL;

SOLID-STATE SENSORS;

EID: 80052126657     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969470     Document Type: Conference Paper

References (11)

1. Howard M. Branz, Vernon E. Yost, Scott Ward, Kim M. Jones, Bobby To and Paul Stradinset, "Nanostructured black silicon and the optical reflectance of graded-density surfaces", Applied Physics Letters, vol. 94, N° 23, 2009.
2. M. Y. Shen, C. H. Crouch, J. E. Carey and E. Mazur, " Femtosecond laser-induced formation of submicrometer spikes on silicon in water", Applied Physics Letters, vol. 85, N°. 23, 6 December 2004.
3. B.M.Damiani, R.Lüdemann, D.S.Ruby, S.H.Zaidi, A.Rohatgi, "Development of RIE-textured silicon solar cells", Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE, 15-22 Sept. 2000, pp.371-374.
4. H. Jansen et al, "The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source," Microelectronics Journal, vol. 32, pp. 769-777, 2001.
5. Z. Huang et al, "Microstructured silicon photodetector", Applied Physics Letters, vol. 89, N° 033506, 2006.
6. Ali Serpengüzel et al, "Luminescence of black silicon", Journal of Nanophotonics, vol. 2, N° 021770, 2008.
7. Tommaso Baldacchini et al, "Superhydrophobic Surfaces Prepared by Microstructuring of Silicon Using a Femtosecond Laser", Langmuir, vol. 22, pp. 4917-4919, 2006.
8. M.Halbwax et al, "Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication", Thin solid films, Vol. 516, issue 20, pp. 6791-6795 (2008).
9. R. Petit,Ed., "Electromagnetic Theory of Gratings", Berlin, Germany : Springer-Verlag,1990.
10. E. Richalot, M. Bonilla, M.-F. Wong, V. Fouad-Hanna, H. Baudrand, J. Wiart, "Electromagnetic Propagation into Reinforced-Concrete Walls", IEEE Trans. Microwave Theory Tech., Vol. 48, No. 3, March 2000, pp.357-366.
11. R. Dussart et al, "Silicon columnar microstructures induced by an SF6/O2 plasma," Journal of Physics D: Applied Physics, 38, 3395, 2005.