Disassembling glancing angle deposited films for high-throughput, single-post growth scaling measurements

Microscopy and Microanalysis

Volumn 18, Issue 5, 2012, Pages 1135-1142

  Siewert, Joshua Morgan Arthur ^a   LaForge, Joshua Michael ^a   Taschuk, Michael Thomas ^a   Brett, Michael Julian ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

broadening; disassembling; GLAD; growth; isolating; scaling; single post

Indexed keywords

EID: 84868547278     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927612001080     Document Type: Article

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