Photocatalytic regeneration of interdigitated capacitor relative humidity sensors fabricated by glancing angle deposition

Sensors and Actuators, B: Chemical

Volumn 134, Issue 2, 2008, Pages 666-671

  Taschuk, Michael T ^a   Steele, John J ^a   van Popta, Andy C ^a   Brett, Michael J ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Glancing angle deposition; Humidity; Nanostructured; Photocatalytic regeneration; Porous sensor; Thin film; TiO2 sensor

Indexed keywords

GLANCING ANGLE DEPOSITION; HUMIDITY; NANOSTRUCTURED; PHOTOCATALYTIC REGENERATION; POROUS SENSOR; THIN FILM; TIO2 SENSOR;

ATMOSPHERIC HUMIDITY;

EID: 51649116805     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.06.009     Document Type: Article

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