Sub-wavelength antireflection coatings from nanostructure sculptured thin films

Contributions to Plasma Physics

Volumn 47, Issue 7, 2007, Pages 545-550

  Schubert, E ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Structure of thin films; Sub wavelength antireflection; Thin film deposition

Indexed keywords

ANTIREFLECTION COATINGS; DEPOSITION; GLASS SUBSTRATES; ION BEAMS; NANOSTRUCTURES; QUARTZ; REFLECTION; SPECTROSCOPIC ELLIPSOMETRY; ULTRAVIOLET SPECTROSCOPY;

ANTIREFLECTION; B-Y IONS; ION BEAM SPUTTER DEPOSITION; QUARTZ SUBSTRATE; SCULPTURED THIN FILMS; STRUCTURE OF THIN FILM; SUB-WAVELENGTH; SUB-WAVELENGTH ANTIREFLECTION; THIN-FILM DEPOSITIONS; THIN-FILMS;

THIN FILMS;

EID: 36849055551     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.200710070     Document Type: Conference Paper

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