Effects of prestrain applied to a polyethylene terephthalate substrate before the coating of al-doped zno film on film quality, electrical properties, and pop-in behavior during nanoindentation

Journal of Microelectromechanical Systems

Volumn 21, Issue 5, 2012, Pages 1059-1070

  Li, Tse Chang ^a   Han, Chang Fu ^a   Wu, Bo Hsiung ^a   Hsieh, Po Tsung ^a   Lin, Jen Fin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Defects; electrical contact resistance (ECR); pop in; prestrain; ZnO

Indexed keywords

AL-DOPED ZNO; AZO FILMS; CONTACT AREAS; ELECTRICAL CONTACT RESISTANCE; ELECTRICAL CURRENT; FILM QUALITY; INFLECTION POINTS; LOADING PROCESS; MEAN SIZE; PET SUBSTRATE; POP-IN; PRE-STRAIN; STRESS-STRAIN; SUBMICROMETERS; ZNO;

ALUMINUM; ALUMINUM COATINGS; CARRIER MOBILITY; COATINGS; CURRENT VOLTAGE CHARACTERISTICS; DEFECTS; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; NANOINDENTATION; PLASTIC BOTTLES; POLYETHYLENE TEREPHTHALATES; ZINC OXIDE;

LOADING;

EID: 84867085021     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2205135     Document Type: Article

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