Active damping within an advanced microlithography system using piezoelectric Smart Discs

Mechatronics

Volumn 14, Issue 1, 2004, Pages 15-34

  Holterman, Jan ^a   De Vries, Theo J A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Active damping; Collocated control; High precision machines; Integral force feedback; Microlithography

Indexed keywords

DAMPING; INTEGRATED CIRCUIT MANUFACTURE; PIEZOELECTRIC DEVICES; SENSORS;

INTEGRAL FORCE FEEDBACK;

LITHOGRAPHY;

EID: 0141637168     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(02)00093-4     Document Type: Article

References (26)

1. Slocum A.H. Precision machine design. 1992;Prentice Hall, Englewood Cliffs, NJ, USA.
2. Smith S.T., Chetwynd D.G. Foundations of ultraprecision mechanism design. 1992;Gordon and Breach Science Publishers, Philadelphia, PA, USA.
3. Nakazawa H. Principles of precision engineering. 1994;Oxford Science Publications, Oxford, UK.
4. Hale LC. Principles and techniques for designing precision machines. PhD thesis, Massachusetts Institute of Technology, Cambridge, MA, USA; 1999.
5. Koster M.P. Constructieprincipes voor het nauwkeurig bewegen en positioneren. 2000;Twente University Press, Enschede, The Netherlands.
6. Van Schothorst G. Active vibration control with piezoelectric Smart Discs. In: Conference proceedings SPIE smart structures and materials: mathematics and control in smart structures, vol. 3667. Newport Beach, California, USA March 1-5; 1999. p. 637-48.
7. Rivin E.I. Stiffness and damping in mechanical design. 1999;Marcel Dekker, New York, USA.
8. Fanson J.L., Anderson E.H., Rapp D. Active structures for use in precision control of large optical systems. Opt. Eng. 29(11):1990;1320-1327.
9. Mead D.J. Passive vibration control. 1998;John Wiley & Sons, Chichester, UK.
10. Joshi S.M. Control of large flexible space structures. 1989;Springer-Verlag, Berlin, Germany.
11. Preumont A. Vibration control of active structures, an introduction. 1997;Kluwer Academic Publishers, Dordrecht, The Netherlands.
12. Holterman J, De Vries TJA, Koster MP. Experiment to evaluate the feasibility of the Smart Disc concept. In: Conference proceedings 6th UK mechatronics forum international conference, mechatronics 98. Skövde, Sweden, September 9-11; 1998. p. 217-22.
13. Holterman J, De Vries TJA. Active structural elements within a general vibration control framework. In: Conference proceedings 1st IFAC conference on mechatronic systems, mechatronics 2000, Darmstadt, Germany, September 18-20; 2000. p. 997-1002.
14. Anderson E.H., Moore D.M., Fanson J.L., Ealey M.A. Development of an active truss element for control of active structures. Opt. Eng. 29(11):1990;1333-1341.
15. Bronowicki AJ, Innis JW, Casteel S, Dvorsky G, Alvarez OS, Rohleen E. Active vibration suppression using modular elements. In: Conference proceedings SPIE smart structures and materials: smart structures and intelligent systems, vol. 2190; 1994, p. 717-28.
16. Anderson EH, Holcomb MD, Bogue AX, Russo FM. Integrated electro-mechanical devices for active control of vibration and sound. In: Adaptive structures and materials systems symposium, international mechanical engineering congress and exposition, Dallas, Texas, USA; 1997.
17. Spangler RL, Russo FM, Palombo DA. A compact integrated vibration control package. In: Conference proceedings SPIE smart structures and materials: smart structures and integrated systems, vol. 3041; 1997. p. 728-40.
18. Edgar T.F., Butler S.W., Campbell W.J., Pfeiffer C., Bode C., Hwang S.B.et al. Automatic control in microelectronics manufacturing: practices, challenges, and possibilities. Automatica. 36(11):2000;1567-1603.
19. Jansen BSH. Smart Disc tuning and application. Enschede, Control Laboratory, Faculty of Electrical Engineering, University of Twente, M.Sc. thesis, Report no. 016R2000, 2000.
20. Harris C.M. Shock and vibration handbook. 1996;McGraw-Hill, New York, USA.
21. Stramigioli S, Maschke B, Van der Schaft A. Passive output feedback and port interconnection. In: Conference proceedings 4th IFAC nonlinear control systems design symposium, Nolcos 98, Enschede, The Netherlands, July 1-3; 1998.
22. Preumont A., Dufour J.P., Malékian C. Active damping by a local force feedback with piezoelectric actuators. J. Guidance, Contr. Dynam. 20(2):1992;390-395.
23. Holterman J. Vibration control of high-precision machines with active structural elements. PhD thesis, Drebbel Institute for Mechatronics, University of Twente, Enschede, The Netherlands; 2002.
24. Holterman J, De Vries TJA. Active and passive damping based on piezoelectric elements, Controllability issues. In: Conference proceedings 3rd workshop on European scientific and industrial collaboration, WESIC 2001. Enschede, The Netherlands, June 27-9; 2001. p. 179-88.
25. Main J.A., Garcia E., Newton D.V. Precision control of piezoelectric actuators using charge feedback. J. Guidance, Contr. Dynam. 18(5):1995;1068-1073.
26. Tichy J., Gautschi G.H. Piezoelektrische Messtechnik: physikalische Grundlagen; Kraft, Druck- und Beschleunigungsaufnehmer; Verstärker. 1980;Springer Verlag, New York, USA.