Active damping based on decoupled collocated control

IEEE/ASME Transactions on Mechatronics

Volumn 10, Issue 2, 2005, Pages 135-145

  Holterman, Jan ^a   de Vries, Theo J A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Active damping; Decoupled control; Integral force feedback; Micro lithography; Modal control; Multiple input multiple output (MIMO) collocated control; Vibration control

Indexed keywords

ACTUATORS; CONTROL SYSTEM SYNTHESIS; DEGREES OF FREEDOM (MECHANICS); FEEDBACK CONTROL; FORCE CONTROL; LENSES; LITHOGRAPHY; PIEZOELECTRIC DEVICES; ROBUSTNESS (CONTROL SYSTEMS); SENSORS; SYSTEM STABILITY; VIBRATION CONTROL;

ACTIVE DAMPING; DECOUPLED CONTROL; INTEGRAL FORCE FEEDBACK; MODAL CONTROL; MULTIPLE INPUT MULTIPLE OUTPUT (MIMO) COLLOCATED CONTROL; PIEZOACTIVE LENS MOUNT;

DAMPING;

EID: 18844438602     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2005.844702     Document Type: Article

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