Photopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications

Applied Physics Letters

Volumn 101, Issue 10, 2012, Pages

  Kandpal, Manoj ^a   Sharan, Chandrashekhar ^b   Poddar, Pankaj ^b   Prashanthi, K ^a   Apte, Prakash R ^a   Ramgopal Rao, V ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^b NATIONAL CHEMICAL LABORATORY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL STUDIES; LOW COST FABRICATION; MICRO-CANTILEVERS; NANO-DEVICES; NANO-METER SCALE; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC PROPERTY; POLYMER COMPOSITE; SELF-POWERED; TEST STRUCTURE; THEORETICAL PREDICTION; VOLUME REDUCTIONS; ZNO NANOPARTICLES;

COMPOSITE FILMS; METAL NANOPARTICLES; NANOCOMPOSITES; THIN FILMS; ZINC OXIDE;

PIEZOELECTRICITY;

EID: 84866051095     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4748575     Document Type: Article

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