A MEMS-based piezoelectric power generator array for vibration energy harvesting

Microelectronics Journal

Volumn 39, Issue 5, 2008, Pages 802-806

  Liu, Jing Quan ^a   Fang, Hua Bin ^a   Xu, Zheng Yi ^b   Mao, Xin Hui ^b   Shen, Xiu Cheng ^a   Chen, Di ^a   Liao, Hang ^b   Cai, Bing Chu ^a  

^a Shanghai Jiao Tong University   (China)

^b HONEYWELL   (United States)

Author keywords

Cantilevers array; Energy harvesting; Low frequency; MEMS; Serial connection; Vibration frequency

Indexed keywords

BANDWIDTH; CANTILEVER BEAMS; ELECTRIC FREQUENCY CONTROL; ELECTRIC POWER GENERATION; ELECTRIC RESISTANCE; MEMS; PIEZOELECTRICITY;

ENERGY HARVESTING; LOW FREQUENCY VIBRATION; PIEZOELECTRIC CANTILEVERS ARRAY; SERIAL CONNECTION; VIBRATION FREQUENCY;

ELECTRIC GENERATORS;

EID: 43149123549     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.12.017     Document Type: Article

References (16)

1. Chandrakasan A., Amirtharajah R., Goodman J., and Rabiner W. Trends in low power digital signal processing. Int. Symp. Circuits Syst. 4 (1998) 604-607
2. Beeby S.P., Tudor M.J., and White N.M. Energy harvesting vibration sources for microsystems applications. Meas. Sci. Technol. 17 (2006) 175-195
3. W.J. Li, T.C.H. Ho, G.M.H. Chan, P.H.W. Leong, H.Y. Wong, Infrared signal transmission by a laser-micromachined vibrationinduced power generator, in: Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems, vol. 1, 2000, pp. 236-239.
4. Williams C.B., and Yates R.B. Analysis of a micro-electric generator for microsystems. Sensors Actuators A 52 (1996) 8-11
5. Amirtharajah R., and Chandrakasan A.P. Self-powered signal processing using vibration-based power generation. IEEE J. Solid State Circuits 33 (1998) 687-695
6. Meninger S., Mur-Miranda J.O., Amirtharajah R., Chandrakasan A.P., and Lang J.H. Vibration-to-electric energy conversion. IEEE Trans. Very Large Scale Integr. VLSI Syst. 9 1 (2001) 64-76
7. Tashiro R., Kabei N., Katayama K., Ishizuka Y., Tsuboi F., and Tsuchiya K. Development of an electrostatic generator that harnasses the motion of a living body. JSME Int. J. Ser. C 43 4 (2000) 916-922
8. Roundy S., Wright P.K., and Rabaey J. A study of low-level vibrations as a power source for wireless sensor nodes. Comput. Commun. 26 (2003) 1131-1144
9. Glynne-Jones P., Beeby S.P., James E.P., and White N.M. The modeling of a piezoelectric vibration powered generator for microsystems. Proceedings of the 11th International Conference on Solid-State Sensors and Actuators, Transducers 2001 and Eurosensors XV (2001), Munich, Germany 46-49
10. Glynne-Jones P., et al. Towards a piezoelectric vibration powered microgenerator. IEE Sci. Meas. Technol. 148 2 (2001) 68-72
11. Shu Y.C., and Lien I.C. Efficiency of energy conversion for a piezoelectric power harvesting systems. J. Micromech. Microeng. 16 (2006) 2429-2438
12. Jeon Y.B., Sood R., Jeong J.H., and Kim S.G. MEMS power generator with transverse mode thin film PZT. Sensors Actuators A 122 (2005) 16-22
13. Roundy S., Leland E.S., Baker J., Carleton E., Reilly E., Lai E., Otis B., Rabaey J.M., Wright P.K., and Sundararajan V. Improving power output for vibration-based energy scavengers. IEEE Pervasive Comput. 4 (2005) 28-36
14. duToit N.E., Wardle B.L., and Kim S.G. Design considerations for MEMS-scale piezoelectric mechanical vibration energy harvesters. Integr. Ferroelectr. 71 (2005) 121-160
15. Fang H.B., Liu J.Q., Xu Z.Y., Chen D., and Cai B.C. A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting. Chinese Phys. lett. 23 (2006) 732-734
16. Fang H.B., Liu J.Q., Xu Z.Y., Chen D., and Cai B.C. Fabrication and performance of a MEMS-based piezoelectric power generator for vibration energy harvesting. Microelectron. J. 37 (2006) 1280-1284