Two-step sintering of aluminum-doped zinc oxide sputtering target by using a submicrometer zinc oxide powder

Ceramics International

Volumn 38, Issue 8, 2012, Pages 6229-6234

  Wu, Ming Wei ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

AZO; Grain size; Microstructure final; Two step sintering

Indexed keywords

ALUMINUM-DOPED ZINC OXIDE; AZO; AZO FILMS; COARSE PARTICLES; GRAIN SIZE; HEXAGONAL STRUCTURES; MICROSTRUCTURE-FINAL; SINTERED DENSITY; SPUTTERING TARGET; SUBMICROMETERS; TIN DOPED INDIUM OXIDE; TWO-STEP SINTERING; ZINC OXIDE (ZNO); ZINC OXIDE POWDER; ZNO; ZNO POWDER;

ALUMINUM; GRAIN SIZE AND SHAPE; TIN; ZINC OXIDE;

SINTERING;

EID: 84865768995     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2012.04.076     Document Type: Article

References (31)

1. T. Minami Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications Thin Solid Films 516 2008 1314 1321
2. G. Fang, D. Li, and B.L. Yao Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering Vacuum 68 2003 363 372
3. 3 targets for a-Si:H/μc-Si:H solar cells Thin Solid Films 518 2009 1085 1090
4. H.S. Huang, H.C. Tung, C.H. Chiu, I.T. Hong, R.Z. Chen, J.T. Chang, and H.K. Lin Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effect on the properties of deposited thin films by direct current magnetron sputtering Thin Solid Films 518 2010 6071 6075
5. T. Minami, J.I. Oda, J.I. Nomoto, and T. Miyata Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering Thin Solid Films 519 2010 385 390
6. K.L. Ying, T.E. Hsieh, and Y.F. Hsieh Colloidal dispersion of nano-scale ZnO powders using amphibious and anionic polyelectrolytes Ceramics International 35 2009 1165 1171
7. K. Nakashima, and Y. Kumahara Effect of tin oxide dispersion on nodule formation in ITO sputtering Vacuum 66 2002 221 226
8. J. Sarkar, P. McDonald, and P. Gilman Surface characteristics of titanium targets and their relevance to sputtering performance Thin Solid Films 517 2009 1970 1976
9. B.L. Gehman, S. Jonsson, T. Rudolph, M. Sherer, M. Weigert, and R. Werner Influence of manufacturing process of indium tin oxide sputtering targets on sputtering behavior Thin Solid Films 220 1992 333 336
10. C.F. Lo, and D. Draper Quantitative measurement of nodule formation in W-Ti sputtering Journal of Vacuum Science and Technology A 16 1998 2418 2422
11. M.W. Wu, D.S. Liu, Y.H. Su, The densification, microstructure, and electrical properties of aluminum-doped zinc oxide sputtering target for transparent conductive oxide film, Journal of the European Ceramic Society, 10.1016/j.jeurceramsoc.2012.04.030, in press.
12. 3 target by slip casting Journal of the American Ceramic Society 92 2009 2168 2171
13. C.P. Liu, and G.R. Jeng Properties of aluminum doped zinc oxide materials and sputtering thin films Journal of Alloys and Compounds 468 2009 343 349
14. J. Zhang, W. Zhang, E. Zhao, and H.J. Jacques Study of high-density AZO ceramic target Materials Science in Semiconductor Processing 14 2011 189 192
15. B. Hwang, Y.K. Paek, S.H. Yang, S. Lim, W.S. Seo, and K.S. Oh Densification of Al-doped ZnO via preliminary heat treatment under external pressure Journal of Alloys and Compounds 509 2011 7478 7483
16. I.W. Chen, and X.H. Wang Sintering dense nanocrystalline ceramics without final-stage grain growth Nature 404 2000 168 171
17. 3 Journal of the American Ceramic Society 89 2006 431 437
18. Z.R. Hesabi, M. Haghighatzadeh, M. Mazaheri, D. Galusek, and S.K. Sadrnezhaad Suppression of grain growth in sub-micrometer alumina via two-step sintering method Journal of the European Ceramic Society 29 2009 1371 1377
19. K. Bodišová, and P. Šajgalík Two-stage sintering of alumina with submicrometer grain size Journal of the American Ceramic Society 90 2007 330 332
20. C.J. Wang, C.Y. Huang, and Y.C. Wu Two-step sintering of fine alumina-zirconia ceramics Ceramics International. 35 2009 1467 1472
21. K. Maca, V. Pouchly, and P. Zalud Two-step sintering of oxide ceramics with various crystal structures Journal of the European Ceramic Society 30 2010 583 589
22. 3 ceramics Integrated Ferroelectrics 99 2008 114 124
23. M. Mazaheri, A.M. Zahedi, and S.K. Sadrnezhaad Two-step sintering of nanocrystalline ZnO compacts-effect of temperature on densification and grain growth Journal of the American Ceramic Society 91 2008 56 63
24. P. Durán, J. Tartaj, and C. Moure Fully dense, fine-grained, doped zinc oxide varistors with improved nonlinear properties by thermal processing optimization Journal of the American Ceramic Society 86 2003 1326 1329
25. 2 synthesized by glycine nitrate process Ceramics International. 35 2009 13 20
26. 3 and Ni-Cu-Zn ferrite Journal of the American Ceramic Society 89 2006 438 443
27. M. Mazaheri, A.M. Zahedi, M. Haghighatzadeh, and S.K. Sadrnezhaad Sintering of titania nanoceramic: densification and grain growth Ceramics International. 35 2009 685 691
28. Y.I. Lee, Y.W. Kim, M. Mitomo, and D.Y. Kim Fabrication of dense nanostructured silicon carbide ceramics through two-step sintering Journal of the American Ceramic Society 86 2003 1803 1805
29. M. Michálková, K. Ghillányová, and D. Galusek Standard and two-stage sintering of a submicrometer alumina powder: the influence on the Sintering Trajectory R.K. Bordia, E.A. Olevsky, Advances in Sintering Science and Technology 209 2010 John Wiley & Sons Inc. New Jersey 421 427
30. M.I. Mendelson Average grain size in polycrystalline ceramics Journal of the American Ceramic Society 52 1969 443 446
31. J. Han, P.Q. Mantas, and A.M.R. Senos Densification and grain growth of Al-doped ZnO Journal of Material Research 16 2001 459 468