Image resolution and sensitivity in an environmental transmission electron microscope

Micron

Volumn 43, Issue 11, 2012, Pages 1156-1168

  Jinschek, J R ^a   Helveg, S ^b  

^a Thermo Fisher Scientific   (United States)

^b HALDOR TOPSØE A S   (Denmark)

Author keywords

Environmental transmission electron microscope; Gas solid interactions; High resolution transmission electron microscopy; In situ studies; Resolution; Sensitivity

Indexed keywords

ATOMIC SCALE; DOSE-RATE; ELECTRON BEAM ENERGY; ENVIRONMENTAL TRANSMISSION ELECTRON MICROSCOPES; GAS CONDITIONS; GAS TYPE; GAS-SOLID; IN-SITU OBSERVATIONS; IN-SITU STUDY; OPTIMAL IMAGING; REACTIVE GAS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SENSITIVITY; SIGNAL TO NOISE (S/N) RATIOS;

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; GASES; IMAGE RESOLUTION; MICROSCOPES; OPTICAL RESOLVING POWER; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 84864832270     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2012.01.006     Document Type: Article

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