Film deposition on the inner surface of tubes using atmospheric-pressure Ar-CH 4, Ar-C 2H 2 and Ar-C 2H 2-H 2 plasmas: Interpretation of film properties from plasma-chemical kinetics

Journal of Physics D: Applied Physics

Volumn 45, Issue 33, 2012, Pages

  Pothiraja, Ramasamy ^a   Engelhardt, Max ^a   Bibinov, Nikita ^a   Awakowicz, Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON AND HYDROGENS; CHEMICAL EROSION; DEPOSITED FILMS; ELECTRON DISTRIBUTION FUNCTION; ELEMENTAL COMPOSITIONS; FILAMENTARY DISCHARGES; FILM DEPOSITION; FILM HARDNESS; FILM PROPERTIES; GAS TEMPERATURE; GLASS TUBES; HIGH DEPOSITION RATES; HYDROCARBON FILMS; HYDROGEN ATOMS; INNER SURFACES; PLASMA CONDITIONS; PLASMA PARAMETER; PRECURSOR MOLECULES; SOFT FILM;

ATMOSPHERIC PRESSURE; DEPOSITION RATES; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; GAS MIXTURES; HYDROCARBONS; HYDROGEN; PHOTOGRAPHY; PLASMA THEORY; TUBES (COMPONENTS);

ARGON;

EID: 84864711892     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/33/335202     Document Type: Article

References (53)

1. Yoshiki H, Abe K and Mitsui T 2006 Thin Solid Films 515 1394 (Pubitemid 44716034)
2. Fujiyama H 2000 Surf. Coat. Technol. 131 278 (Pubitemid 32007209)
3. Hytry R, Möller W and Wilhelm R 1994 Appl. Phys. Lett. 64 3401
4. Wang L, Huang L, Wang Y, Xie Z and Wang X 2008 Surf. Coat. Technol. 202 3391 (Pubitemid 351331089)
5. Babukutty Y, Prat R, Endo K, Kogoma M, Okazaki S and Kodama M 1999 Langmuir 15 7055
6. Prat R, Koh Y J, Babukutty Y, Kogoma M, Okazaki S and Kodama M 2000 Polymer 41 7355 (Pubitemid 30410665)
7. Pothiraja R, Bibinov N and Awakowicz P 2011 J. Phys. D: Appl. Phys. 44 355206
8. Pothiraja R, Bibinov N and Awakowicz P 2010 J. Phys. D: Appl. Phys. 43 495201
9. Fedosenko G, Schwabedissen A, Korzec D and Engemann J 2001 Surf. Coat. Technol. 142-144 693 (Pubitemid 32931776)
10. Martin L R and Hill M W 1990 J. Mater. Sci. Lett. 9 621
11. Pothiraja R, Milanov A P, Barreca D, Gasparotto A, Becker H-W, Winter M, Fischer R A and Devi A 2009 Chem. Commun. 1978
12. Pothiraja R, Milanov A, Parala H, Winter M, Fischer R A and Devi A 2009 Dalton Trans. 654
13. Poon B, Rittel D and Ravichandran G 2008 Int. J. Solids Struct. 45 6018
14. Bibinov N, Halfmann H, Awakowicz P and Wiesemann K 2007 Meas. Sci. Technol. 18 1327 (Pubitemid 46591486)
15. Stefanoviæ I, Bibinov N K, Deryugin A A, Vinogradov I P, Napartovich A P and Wiesemann K 2001 Plasma Sources Sci. Technol. 10 406 (Pubitemid 32841183)
16. Itikawa Y 2006 J. Phys. Chem. Ref. Data 35 31 (Pubitemid 44356675)
17. Dasgupta A, Blaha M and Giuliani J L 1999 Phys. Rev. A 61 012703
18. Ralchenko Yu, Kramida A and Reader J NIST ASD Team 2012 NIST Atomic Spectra Database V.4 www.nist.gov/pml/data/asd.cfm
19. Preppernau B L, Pearce K, Tserepi A, Wurzberg E and Miller T A 1995 Chem. Phys. 196 371
20. Mahan A H, Gallagher A and Smith S J 1976 Phys. Rev. A 13 156
21. Veldhuizen E M v, Rutgers W R and Ebert U 2002 Int. Symp. HAKONE VIII (Pühajärve, Estonia,) p 33
22. Murugavel R and Pothiraja R 2003 New J. Chem. 27 968 (Pubitemid 36774094)
23. Murugavel R, Pothiraja R, Shanmugan S, Singh N and Butcher R J 2007 J. Organomet. Chem. 692 1920 (Pubitemid 46483501)
24. Pothiraja R, Sathiyendiran M, Butcher R J and Murugavel R 2005 Inorg. Chem. 44 6314 (Pubitemid 41323480)
25. Stan G E, Marcov D A, Popa A C and Husanu M A 2010 D. J. Nanomater. Biostruct. 5 705
26. Murakami Y, Hosaka K and Hamaguchi S 2010 J. Phys.: Conf. Ser. 232 012007
27. Schlüter M, Hopf C, Schwarz-Selinger T and Jacob W 2008 J. Nucl. Mater. 376 33
28. Aleksandrov N L, Bazelyan E M, Gorunov A Y and Kochetov I V 1999 J. Phys D: Appl. Phys. 32 2636 (Pubitemid 30532006)
29. Aleksandrov N L, Bazelyan E M and Novitskii G A 2001 J. Phys D: Appl. Phys. 34 1374 (Pubitemid 32457245)
30. Ervin K M, Gronert S, Barlow S E, Gilles M K, Harrison A G, Bierbaum V M, DePuy C H, Lineberger W C and Ellison G B 1990 J. Am. Chem. Soc. 112 5750
31. de Heer F J 1981 Phys. Scr. 23 170
32. Stephan K, Helm H and Märk T D 1980 J. Chem. Phys. 73 3763
33. Khakoo M A et al 2004 J. Phys. B: At. Mol. Opt. Phys. 37 247
34. Alman D A, Ruzic D N and Brooks J N 2002 Phys. Plasmas 9 738 (Pubitemid 34148561)
35. Baulch D L et al 1994 J. Phys. Chem. Ref. Data 23 847
36. Denysenko I B, Xu S, Long J D, Rutkevych P P, Azarenkov N A and Ostrikov K 2004 J. Appl. Phys. 95 2713
37. Pitts W M, Pasternack L and McDonald J R 1982 Chem. Phys. 68 417
38. Shiu Y J and Biondi M A 1978 Phys. Rev. A 17 868
39. Sieck L W and Lias S G 1976 J. Phys. Chem. Ref. Data 5 1123
40. Tsang W and Hampson R F 1986 J. Phys. Chem. Ref. Data 15 1087
41. Pastol A and Catherine Y 1990 J. Phys. D: Appl. Phys. 23 799
42. Behringer K 1991 Plasma Phys. Control. Fusion 33 997
43. Möller W 1993 Appl. Phys. A 56 527
44. Bauer M, Schwarz-Selinger T, Jacob W and von Keudell A 2005 J. Appl. Phys. 98 073302 (Pubitemid 41509088)
45. Awakowicz P, Schwefel R, Scheubert P and Benstetter G 2001 Surf. Coat. Technol. 142-144 342 (Pubitemid 32931734)
46. Horn A, Schenk A, Biener J, Winter B, Lutterloh C, Wittmann M and Küppers J 1994 Chem. Phys. Lett. 231 193
47. Shul R J, Passarella R, Yang X L, Keesee R G and Castleman J A W 1987 J. Chem. Phys. 87 1630
48. Leutner H W and Stokes C S 1961 Indust. Eng. Chem. 53 341
49. Yao S L, Suzuki E, Meng N and Nakayama A 2002 Plasma Chem. Plasma Process. 22 225
50. Farhat S K, Morter C L and Glass G P 1993 J. Phys. Chem. 97 12789
51. Kovacs T, Blitz M A and Seakins P W 2010 J. Phys. Chem. A 114 4735
52. Sankaran R M, Giapis K P, Moselhy M and Schoenbach K H 2003 Appl. Phys. Lett. 83 4728
53. Okabe H 1978 Photochemistry of Small Molecules (New York: Wiley)