Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 693-697

  Fedosenko, G ^a   Schwabedissen, A ^a   Korzec, D ^a   Engemann, J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Diamond like carbon film; Plasma density; Remote plasma

Indexed keywords

CATHODES; DEPOSITION; ELECTRIC DISCHARGES; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GASES; IMPEDANCE MATCHING (ACOUSTIC); RAMAN SPECTROSCOPY; REFRACTIVE INDEX;

HOLLOW CATHODE DISCHARGE (HCD);

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON; FILM; PLASMA TREATMENT; WEAR RESISTANCE;

EID: 0035387789     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01104-5     Document Type: Article

References (17)