A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology

Nanotechnology

Volumn 23, Issue 32, 2012, Pages

  Cullinan, Michael A ^a,b   Panas, Robert M ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE SENSOR; MEMS FORCES; MEMS SENSORS; MULTI-AXIS; ORDERS OF MAGNITUDE; PIEZORESISTIVE SENSORS; PIEZORESISTOR; SENSOR FABRICATION; SENSOR SYSTEMS;

CARBON NANOTUBES; ELECTROMECHANICAL DEVICES; MEMS;

SENSORS;

EID: 84864407873     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/32/325501     Document Type: Article

References (40)

1. Xue W, Krishna B V, Bandyopadhyay A and Bose S 2007 Processing and biocompatibility evaluation of laser processed porous titanium Acta Biomater. 3 1007-18 (Pubitemid 47382673)
2. Stampfer C, Jungen A, Linderman R, Obergfell D, Roth S and Hierold C 2006 Nano-electromechanical displacement sensing based on single-walled carbon nanotubes Nano Lett. 6 1449-53 (Pubitemid 44195326)
3. Beyeler F, Muntwyler S, Nelson B J and Member S 2009 A six-axis MEMS force-torque sensor with micro-Newton and nano-newtonmeter resolution J. Microelectromech. Syst. 18 433-41
4. Sun Y and Nelson B J 2007 MEMS capacitive force sensors for cellular and flight biomechanics Biomed. Mater. 2 S16-22 (Pubitemid 47007468)
5. Jager G et al 2003 Miniature interferometers for applications in microtechnology and nanotechnology Proc. SPIE 5190 185-92
6. Zhang Z and Menq C-H 2007 Laser interferometric system for six-axis motion measurement no title Rev. Sci. Instrum. 78 083107 (Pubitemid 47354017)
7. Tortonese M, Barrett R C and Quate C F 1993 Atomic resolution with an atomic force microscope piezoresistive detection Appl. Phys. Lett. 62 834-6
8. Chui B, Kenny T, Mamin H, Terris B and Rugar D 1998 Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever Appl. Phys. Lett. 72 1388-90 (Pubitemid 128671177)
9. Duc T C, Creemer J and Sarro P M 2007 Piezoresistive cantilever beam for force sensing in two dimensions IEEE Sensors J. 7 96-104 (Pubitemid 46113472)
10. Beeby S, Ensell G, Kraft M and White N 2004 MEMS Mechanical Sensors 1st edn (Norwood, MA: Artchen House) p 88
11. Kanda Y 1982 A graphical representation of piezoresistance coefficients in silicon IEEE Trans. Electron Dev. 29 64-70 (Pubitemid 12474034)
12. Cullinan M and Culpepper M 2010 Carbon nanotubes as piezoresistive microelectromechanical sensors: theory and experiment Phys. Rev. B 82 115482
13. Panas R M, Cullinan M A and Culpepper M L 2012 Design of piezoresistive-based MEMS sensor systems for precision microsystems Precis. Eng. 36 44-54
14. Xue W and Cui T 2008 Electrical and electromechanical characteristics of self-assembled carbon nanotube thin films on flexible substrates Sensors Actuators A 145/146 330-5
15. Li Z, Dharap P, Nagarajaiah S, Barrera E V and Kim J 2004 Carbon nanotube film sensors Adv. Mater. 16 640-3
16. Li X, Levy C and Elaadil L 2008 Multiwalled carbon nanotube film for strain sensing Nanotechnology 19 045501
17. Vemuru S M, Wahi R, Nagarajaiah S and Ajayan P M 2009 Strain sensing using a multiwalled carbon nanotube film J. Strain Anal. Eng. Des. 44 555-62
18. Dharap P, Li Z, Nagarajaiah S and Barrera E 2004 Nanotube film based on single-wall carbon nanotubes for strain sensing Nanotechnology 15 379-82
19. Tong J and Sun Y 2007 Toward carbon nanotube-based AFM cantilevers IEEE Trans. Nanotechnol. 6 519-23 (Pubitemid 47460434)
20. Yang X, Zhou Z, Zheng F, Zhang M, Zhang J and Yao Y 2009 A high sensitivity single-walled carbon-nanotube-array-based strain sensor for weighing Solid-State Sensors, Actuators and Microsystems Conf., 2009 pp 1493-6
21. Xie Y and Tabib-Azar M 2006 Telescoping self-aligned metal-catalyzed carbon nanotube piezoresistors as strain gauges IEEE Sensors 2006 pp 1407-10
22. Dohn S, Kjelstruphansen J, Madsen D, Molhave K and Boggild P 2005 Multi-walled carbon nanotubes integrated in microcantilevers for application of tensile strain Ultramicroscopy 105 209-14 (Pubitemid 41539709)
23. Chang N-K, Su C-C and Chang S-H 2008 Fabrication of single-walled carbon nanotube flexible strain sensors with high sensitivity Appl. Phys. Lett. 92 063501 (Pubitemid 351263875)
24. Maune H and Bockrath M 2006 Elastomeric carbon nanotube circuits for local strain sensing Appl. Phys. Lett. 89 173131 (Pubitemid 44656733)
25. Stampfer C, Helbling T, Obergfell D, Schöberle B, Tripp M K, Jungen A, Roth S, Bright V M and Hierold C 2006 Fabrication of single-walled carbon-nanotube-based pressure sensors Nano Lett. 6 233-7 (Pubitemid 43382958)
26. Stampfer C, Jungen A and Hierold C 2006 Fabrication of discrete nanoscaled force sensors based on single-walled carbon nanotubes IEEE Sensors J. 6 613-7 (Pubitemid 46405045)
27. Helbling T, Roman C and Hierold C 2010 Signal-to-noise ratio in carbon nanotube electromechanical piezoresistive sensors Nano Lett. 10 3350-4
28. Dibiasio C M and Culpepper M L 2009 Design of a six degree of freedom nanopisitioner for use in massively parallel probe-based nanomanufacturing Proc. 2009 Annual Mtg of the Am. Soc. for Precision Eng.
29. Van Vliet K 2003 The biomechanics toolbox: experimental approaches for living cells and biomolecules Acta Mater. 51 5881-905
30. Panas R M, Cullinan M A and Culpepper M L 2010 A systems approach to modeling of piezoresistive MEMS sensors Proc. 2010 Am. Soc. for Precision Eng., Control of Precision Systems Conf.
31. Cullinan M A 2011 Design and Fabrication of Precision Carbon Nanotube-Based Flexural Transducers (Cambridge, MA: Massachusetts Institute of Technology)
32. Itkis M E, Borondics F, Yu A and Haddon R C 2006 Bolometric infrared photoresponse of suspended single-walled carbon nanotube films Science 312 413-6
33. Lu R, Xu G and Wu J Z 2011 Effects of thermal annealing on noise property and temperature coefficient of resistance of single-walled carbon nanotube films Appl. Phys. Lett. 93 213101
34. Koechlin C, Maine S, Haidar R, Trétout B, Loiseau A and Pelouard J 2010 Electrical characterization of devices based on carbon nanotube films Appl. Phys. Lett. 96 103501
35. Cullinan M A, Panas R M and Culpepper M L 2009 Design of micro-scale multi-axis force sensors for precision applications Proc. 2009 Am. Soc. for Precision Eng.
36. Sun Y, Nelson B, Potasek D and Enikov E 2002 A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives J. Micromech. Microeng. 12 832-40 (Pubitemid 35369264)
37. Lee J-I, Huang X and Chu P B 2009 Nanoprecision MEMS capacitive sensor for linear and rotational positioning J. Microelectromech. Syst. 18 660-70
38. DiBiasio C M 2010 Concept Synthesis and Design Optimization of Meso-scale, Multi-Degree-of-Freedom Precision Flexure Motion Systems with Integrated Strain-based Sensors (Cambridge, MA: Massachusetts Institute of Technology)
39. Cullinan M A and Culpepper M L 2010 Noise mitigation techniques for carbon nanotube-based piezoresistive sensor systems Proc. 2010 Fall Mtg of the Materials Research Society
40. Cullinan M A and Culpepper M L 2011 Design and fabrication of single chirality carbon nanotube-based sensors 11th IEEE Conf. Nanotechnology pp 5-8