Design of piezoresistive-based MEMS sensor systems for precision microsystems

Precision Engineering

Volumn 36, Issue 1, 2012, Pages 44-54

  Panas, Robert M ^a   Cullinan, Michael A ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

Design; MEMs; Optimization; Piezoresistor; Sensor; Strain gauge

Indexed keywords

DESIGN PARAMETERS; DISPLACEMENT SENSOR; DYNAMIC RANGE; HIGH-SPEED; MEMS SENSORS; ORDERS OF MAGNITUDE; PERFORMANCE REQUIREMENTS; PIEZORESISTIVE SENSING; PIEZORESISTOR; RAPID OPTIMIZATION; SENSING SYSTEMS; SMALL-SCALE SYSTEMS; STRAIN GAUGE; SYSTEMS APPROACH; UNDERLYING PRINCIPLES;

DESIGN; GAGES; OPTIMIZATION; SENSORS; SYSTEMS ANALYSIS;

MATHEMATICAL MODELS;

EID: 80054931620     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2011.07.004     Document Type: Article

References (20)

1. Y. Yang, Z. Dong, Y. Qu, M. Li, and W.J. Li A programmable AFM-based nanomanipulation method using vibration-mode operation Proc. 4th int. conf. nano/micro engineered and molecular systems Sanya, China 2008 681 685
2. J. Otero, and M. Puig-Vidal Low-noise instrumentation for the measurement of piezoresistive AFM cantilever deflection in robotic nanobiocharacterization applications IEEE int. instrumentation and measurment technology conf. Victoria, Canada 2008 1392 1396
3. Y. Kanda, and A. Yasukawa Optimum design for silicon piezoresistive pressure sensors Sensors and Actuators A 62 1997 539 542 (Pubitemid 127389635)
4. N. Yazdi, F. Ayazi, and K. Najfi Micromachined Inertial Sensors Proc. IEEE, 86 1998 1640 1659
5. M. Li, H.X. Tang, and M.L. Roukes Ultra-sensitive NEMS-based cantilevers for sensing. scanned probe and very high-frequency applications Nature Nanotechnology 2 2007 114 120 (Pubitemid 46226371)
6. J. Thysen, A. Boisen, O. Hansen, and S. Bouwstra Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical wheatstone bridge arrangement Sensors and Actuators A 3 2000 47 53
7. J.A Harley, and T.W. Kenny 1/F noise considerations for the design and process optimization of piezoresistive cantilevers Journal of Microelectromechanical Systems 9 2000 226 235
8. A.H. Slocum Precision machine design 1992 Society of Manufacturing Engineers Dearborn, MI
9. F. Bayeler, S. Muntwyler, and B.J. Nelson A Six-axis MEMS force-torque sensor with micro-newton and nano-newtonmeter resolution Journal of Microelectromechanical Systems 18 2009 433 441
10. X. Yu, J. Thaysen, O. Hansen, and A. Boisen Optimization of sensitivity and noise in piezoresistive cantilevers Journal of Applied Physics 92 2002 6296 6301 (Pubitemid 35445644)
11. B.L. Pruitt, and T.W. Kenny Piezoresistive cantilevers and measurement system for characterizing low force electrical contacts Sensors and Actuators A 104 2003 68 77
12. P.J French, and Polysilicon: A versatile material for microsystems Sensors and Actuators A 99 2002 3 12
13. M.A. Cullinan, R.M. Panas, and M.L. Culpepper Design of micro-scale multi-axis force sensors for precision applications Proc. annual meeting of the American society for precision engineering Monterey, CA 2009
14. N.K. Upreti, and S. Singh Grain boundary effect on the electrical properties of boron-doped polysilicon films Bulletin of Materials Science 14 1991 1331 1341
15. R. Berderlow, W. Webber, C. Dahl, D. Schmitt-Landsiedel, and R. Thewes Low-frequency noise of integrated poly-silicon resistors IEEE Transactions on Electron Devices 48 2001 1180 1187 (Pubitemid 32576953)
16. D. Ramos, J. Tamayo, J. Mertens, M. Calleja, L.G. Villanueva, and A. Zaballos Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits Nanotechnology 19 2008 035503
17. S.D. Senturia Microsystem design 2002 Kluwer Academic Publishers Boston, MA
18. Omega Engineering, Inc. The pressure strain and force handbook 8th ed. 2006 Omega Engineering Inc. Stamford, CT
19. G.F. Franklin, J.D. Powell, and A. Emami-Naeini Feedback control of dynamic systems 5th ed. 2006 Pearson Prentice Hall Upper Saddle River, NJ
20. M.A. Cullinan, and M.L. Culpepper Carbon nanotubes as piezoresistive microelectromechanical sensors: theory and experiment Physical Review B 82 2010 115428