Miniature interferometers for applications in microtechnology and nanotechnology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 185-192

  Jäger, Gerd ^a   Manske, Eberhard ^a   Hausotte, Tino ^a   Füßl, Roland ^a   Grünwald, Rainer ^a   Büchner, Hans ^a   Schott, Walter ^b   Dontsov, Denys ^b  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b SIOS Messtechnik GmbH   (Germany)

Author keywords

Corner cube rerroreflectors; Fiberoptic lightguides; Laser vibrometers; Laser interferometric force sensors; Miniature interferometers; Nanomeasuring machines; Plane mirror retroreflectors; Scanning force microscopes

Indexed keywords

ACCELERATION; FORCE MEASUREMENT; LASERS; MICROSCOPES; MIRRORS; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; PRESSURE EFFECTS; SCANNING; SIGNAL PROCESSING; VELOCITY MEASUREMENT;

CORNER-CUBE RETROREFLECTORS; FIBEROPTIC LIGHTGUIDES; LASER VIBROMETERS; LASER-INTERFEROMETRIC FORCE SENSORS; MINIATURE INTERFEROMETERS; NANOMEASURING MACHINES; PLANE-MIRROR RETROREFLECTORS; SCANNING FORCE MICROSCOPES;

INTERFEROMETERS;

EID: 2342447983     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507906     Document Type: Conference Paper

References (9)

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2. G. Jäger: "Precision distance measurement by means of miniaturized interferometers." Proceedings of the XIIIth IMEKO World Congress, Vol. 3, Turin, Italy (September 1994), pp. 1712 - 1716.
3. G. Jäger, R. Grünwald, and E. Manske: "Lichtwellenleitergekoppelte interferenzoptische Sensoren." Tm 57, 9 (1990), pp. 319-322.
4. Nanometrology with Miniature Laser Interferometers. Brochure published by SIOS Meßtechnik GmbH, Ilmenau, Germany.
5. H. Büchner, G. Jäger, and E. Manske: "Laserinterferometrically assisted 3D-nanometrology on the atomic force microscope type VERITEKT." Proceedings of the 1st euspen International Conference (May 1999).
6. G. Jäger, E. Manske, T. Hausotte, H. Büchner, R. Grünwald, and W. Schott: "Nanomeasuring technology - nanomeasuring machines." Proceedings of the 16th Annual Meeting of the ASPE, Crystal City, Arlington, Virginia, USA (November 2001), pp. 23 - 27.
7. G. Jäger, E. Manske, T. Hausotte, and W. Schott: "Operation and Analysis of a Nanopositioning and Nanomeasuring Machine." Proceedings of the 17th Annual Meeting of the ASPE, St. Louis, Missouri, USA (2002), pp. 299 - 304.
8. G. Jäger, R. Füßl, and U. Gerhardt: "Optical interference force measuring and weighing cells for dynamic weighing of small loads. Proceedings of the XVth IMEKO World Congress, Vol. III, Osaka, Japan (June 13 - 18, 1999), pp. 39 - 42.
9. D. Dontsov, G. Jäger, and U. Gerhardt: "Homodyne fibre coupled laser vibrometer." Proceedings of the euspen 2003, Aachen, Germany (2003).