A systems approach to modeling piezoresistive mems sensors

Proceedings - ASPE Spring Topical Meeting on Control of Precision Systems, ASPE 2010

Volumn 48, Issue , 2010, Pages 105-110

  Panas, Robert M ^a   Cullinan, Michael A ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN PARAMETERS; FORCE AND DISPLACEMENTS; PERFORMANCE REQUIREMENTS; PIEZO-RESISTIVE; PIEZO-RESISTIVE SENSORS; PIEZORESISTIVE SENSING; SYSTEMS APPROACH; TRADITIONAL APPROACHES;

COMMERCE; DESIGN;

SENSORS;

EID: 84884345387     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

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