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Volumn , Issue , 2009, Pages

Design of micro-scale multi-axis force sensors for precision applications

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FORCES; BIOLOGICALLY ACTIVE SURFACES; CLOSED FORM MODELING; DESIGN PROCESS; PRECISION APPLICATIONS; SENSOR SYSTEMS; STRAIN SENSITIVITY; SYSTEM ARCHITECTURES;

EID: 84885224632     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (12)
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    • Sun Y, and Nelson B, MEMS Capacitive Force Sensors for Cellular and Flight Biomechanics. Biomedical Materials. 2007; 2: S16-S22.
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  • 2
    • 67349171852 scopus 로고    scopus 로고
    • A six-axis mems force-torque sensor with micro-newton and nano-newtonmeter resolution
    • Beyeler F, Muntwyler S, and Nelson B, A Six-Axis MEMS Force-Torque Sensor with Micro-Newton and Nano-Newtonmeter Resolution. Journal of Microelectromechanical Systems. 2009; 2: 433-441.
    • (2009) Journal of Microelectromechanical Systems , vol.2 , pp. 433-441
    • Beyeler, F.1    Muntwyler, S.2    Nelson, B.3
  • 3
    • 21544472129 scopus 로고
    • Atomic resolution with an atomic force microscope using piezoresistive detection
    • Tortonese M, Barrett R, and Quate C, Atomic Resolution with an Atomic Force Microscope Using Piezoresistive Detection. Applied Physics Letters. 1993; 62: 834-836.
    • (1993) Applied Physics Letters , vol.62 , pp. 834-836
    • Tortonese, M.1    Barrett, R.2    Quate, C.3
  • 4
    • 33846290966 scopus 로고    scopus 로고
    • Piezoresistive cantlever beam for force sensing in two dimensions
    • Duc T, Creemer J, and Sarro P, Piezoresistive Cantlever Beam for Force Sensing in Two Dimensions. IEEE Sensors Journal. 2007; 7: 96-104.
    • (2007) IEEE Sensors Journal , vol.7 , pp. 96-104
    • Duc, T.1    Creemer, J.2    Sarro, P.3
  • 5
    • 0000734413 scopus 로고    scopus 로고
    • Independent detection of vertical and lateral forces with a sidewallimplanted dual-axis piezoresistive cantilever
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    • (1998) Applied Physics Letters , vol.72 , pp. 1388-1390
    • Chui, B.1    Kenny, T.2    Mamin, H.3    Terris, B.4    Rugar, D.5
  • 7
    • 34548523637 scopus 로고    scopus 로고
    • Processing and biocompatibility evaluation of laser processed porous titanium
    • Xue W, Krishna B. Bandyodhyay A, and Bose S, Processing and Biocompatibility Evaluation of Laser Processed Porous Titanium. Acta Biomaterialia. 2007; 3: 1007- 1018.
    • (2007) Acta Biomaterialia , vol.3 , pp. 1007-1018
    • Xue, W.1    Krishna, B.B.A.2    Bose, S.3
  • 8
    • 0142029493 scopus 로고    scopus 로고
    • The biomechanics toolbox: Experimental approaches for cells and biomolecules
    • Vliet K, Bao G, and Suresh S, The Biomechanics Toolbox: Experimental Approaches for Cells and Biomolecules. Acta Materialia. 2003; 53:5881-5905.
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    • Vliet, K.1    Bao, G.2    Suresh, S.3
  • 9
    • 33744936531 scopus 로고    scopus 로고
    • Design of a sixaxis micro-scale nanopositioner - μhexflex
    • Chen S, and Culpepper M, Design of a Sixaxis Micro-scale Nanopositioner - μHexFlex. Precision Engineering. 2006; 30: 314-324.
    • (2006) Precision Engineering , vol.30 , pp. 314-324
    • Chen, S.1    Culpepper, M.2
  • 10
    • 0025404176 scopus 로고
    • An analytical model for 1/f noise in polycrystalline silicon thin films
    • Luo M, and Bosman G, An Analytical Model for 1/f Noise in Polycrystalline Silicon Thin Films. IEEE Transactions on Electron Devices. 1990; 37: 768-774.
    • (1990) IEEE Transactions on Electron Devices , vol.37 , pp. 768-774
    • Luo, M.1    Bosman, G.2
  • 12
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    • Fabrication of single-walled carbon nanotube flexible strain sensors with high sensitivity
    • Chang N, Su C, and Chang S, Fabrication of Single-walled Carbon Nanotube Flexible Strain Sensors with High Sensitivity. Applied Physics Letters. 2008; 92: 063501.
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    • Chang, N.1    Su, C.2    Chang, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.