Telescoping self-aligned metal-catalyzed carbon nanotube piezoresistors as strain gauges

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 1407-1410

  Xie, Yan ^a   Tabib Azar, Massood ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAGES; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; METALS; MULTIWALLED CARBON NANOTUBES (MWCN); NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; NONMETALS; SENSORS; SILICON; THICKNESS MEASUREMENT;

ATOMIC FORCE MICROSCOPE; CHEMICAL VAPORS; DEPOSITION TECHNIQUES; MULTI-WALLED CARBON NANOTUBE; PIEZO-RESISTORS; RESISTANCE CHANGES; SELF-ALIGNED; SILICON CANTILEVERS; WELD STRENGTH;

CARBON NANOTUBES;

EID: 50149108613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355895     Document Type: Conference Paper

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