Sub-100 nm material processing and imaging with a sub-15 femtosecond laser scanning microscope

Journal of Laser Applications

Volumn 24, Issue 4, 2012, Pages

  König, Karsten ^a   Uchugonova, Aisada ^a   Straub, Martin ^a   Zhang, Huijing ^a   Licht, Martin ^a   Afshar, Maziar ^a   Feili, Dara ^a   Seidel, Helmut ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

femtosecond laser; ITO; laser microscope; multiphoton; nanolithography; nanomachining; nanoprocessing; nanosurgery; ripple; sub 100 nm; transfection; two photon microscopy

Indexed keywords

ITO; LASER MICROSCOPES; MULTIPHOTONS; NANOMACHINING; NANOPROCESSING; NANOSURGERY; RIPPLE; SUB-100 NM; TRANSFECTION; TWO PHOTON MICROSCOPY;

NANOLITHOGRAPHY; PHOTONS; PHOTORESISTS; SILICON WAFERS; ULTRASHORT PULSES;

MICROSCOPES;

EID: 84864152783     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.4718858     Document Type: Article

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