Laser direct write patterning technique of indium tin oxide film

Thin Solid Films

Volumn 515, Issue 24 SPEC. ISS., 2007, Pages 8515-8518

  Chen, Ming Fei ^a   Chen, Yu Pin ^a   Hsiao, Wen Tse ^a   Gu, Zhi Peng ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

Flat panel display (FPD); Indium tin oxide (ITO); Laser direct writing; Transparent conductive oxide (TCO)

Indexed keywords

CIRCUIT SIMULATION; FLAT PANEL DISPLAYS; OXIDE FILMS; PHOTOLITHOGRAPHY; WAVELENGTH; WET ETCHING;

CHEMICAL WET ETCHING; INDIUM TIN OXIDE (ITO) FILMS; LASER DIRECT WRITING; TRANSPARENT CONDUCTIVE OXIDE (TCO);

CONDUCTIVE FILMS;

EID: 34548863363     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.172     Document Type: Article

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