Multiphoton lithography and ITO structuring by high repetition-rate sub-15 femtosecond laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7920, Issue , 2011, Pages

  Afshar, Maziar ^a   Saremi, Somaie ^a   Völlm, Henning ^a   Feili, Dara ^a   Seidel, Helmut ^a   Straub, Martin ^a   Zhang, H ^a   König, Karsten ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

Indium tin oxide; Laser materials processing; Nanostructures; Nanowires; Sub 100 nm structures; Sub 15 fs laser pulses; Two photon polymerization

Indexed keywords

FS LASER PULSE; INDIUM TIN OXIDE; LASER MATERIALS PROCESSING; SUB-100 NM; TWO PHOTON POLYMERIZATION;

ASPECT RATIO; INDIUM; LASER APPLICATIONS; MANUFACTURE; MICROELECTRONICS; NANOWIRES; OXIDE FILMS; PHOTONS; PHOTORESISTS; POLYMERIZATION; POLYMERS; PULSE REPETITION RATE; TIN; ULTRAFAST LASERS; ULTRASHORT PULSES; X RAY LITHOGRAPHY;

INFRARED LASERS;

EID: 79953020275     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.875897     Document Type: Conference Paper

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