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Volumn 17, Issue 8, 2008, Pages 3108-3114
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Studies of diamond-like carbon (DLC) films deposited on stainless steel substrate with Si/SiC intermediate layers
a
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Author keywords
Diamond like carbon (DLC); Intermediate layers; Stainless steel substrate
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ATOMIC PHYSICS;
ATOMIC SPECTROSCOPY;
ATOMS;
BIAS VOLTAGE;
CARBON;
CARBON FILMS;
CRYSTAL ATOMIC STRUCTURE;
CYCLOTRONS;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
ELECTRIC LOAD MANAGEMENT;
GRAPHITE;
HARDNESS;
INERT GAS WELDING;
MICROSCOPIC EXAMINATION;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMAS;
SILICON;
STAINLESS STEEL;
STEEL;
STEEL CORROSION;
STEEL METALLURGY;
STRESSES;
WAVEGUIDES;
ATOMIC FORCES;
CARBON ATOMS;
CARBON DENSITIES;
CHEMICAL VAPOUR DEPOSITIONS;
DEPOSITION BIASES;
DIAMOND-LIKE CARBON (DLC);
DIAMOND-LIKE CARBONS;
DLC FILMS;
ECRPECVD;
INTEGRATED INTENSITIES;
INTERMEDIATE LAYERS;
INTERNAL STRESSES;
MECHANICAL BEHAVIOURS;
MICROWAVE ELECTRON CYCLOTRON RESONANCES;
NANO INDENTATIONS;
PARTICLE BOMBARDMENTS;
PEAK VALUES;
PHYSICAL VAPOUR DEPOSITIONS;
RING STRUCTURES;
SELF-BIAS VOLTAGES;
SI ATOMS;
SILICON ADDITIONS;
STEEL SUBSTRATES;
STRUCTURAL MORPHOLOGIES;
STRUCTURAL TRANSITIONS;
TARGET POWERS;
SUBSTRATES;
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EID: 56349087507
PISSN: 16741056
EISSN: None
Source Type: Journal
DOI: 10.1088/1674-1056/17/8/057 Document Type: Article |
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Times cited : (12)
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References (23)
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