Preparation and tribological properties of DLC/Ti film by pulsed laser arc deposition

Chinese Physics

Volumn 15, Issue 11, 2006, Pages 2697-2705

  Zhang, Zhen Yu ^a   Lu, Xin Chun ^a   Luo, Jian Bin ^a   Shao, Tian Min ^a   Qing, Tao ^a   Zhang, Chen Hui ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Diamond like carbon; Pulsed laser arc deposition; Raman spectroscopy; Tribological property

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; RAMAN SPECTROSCOPY; THIN FILMS; TITANIUM;

COEFFICIENT OF FRICTION; NANOINDENTER; PULSED LASER ARC DEPOSITION; SPECTROSCOPIC ELLIPSOMETER;

PULSED LASER DEPOSITION;

EID: 33846109502     PISSN: 10091963     EISSN: 17414199     Source Type: Journal    
DOI: 10.1088/1009-1963/15/11/039     Document Type: Article

References (26)

1. Dorner A, Wielage B and Schurer C 1999 Thin Solid Films 355-356 214
2. Sun Z, Shi X and Liu E 1999 Thin Solid Films 355-356 146
3. Robertson J 2002 Mater. Sci. Eng. R 37 129
4. Niu Y X, Huang F, Duan X F, Wang Y F, Zhang P, He C J, Yu H and Yao J Q 2005 Acta. Phys. Sin. 54 4816 (in Chinese)
5. Jiang M F and Ning Z Y 2004 Acta Phys. Sin. 53 1588 (in Chinese)
6. Li L H, Zhang H Q, Cui X M and Zhang Y H 2001 Acta Phys. Sin. 50 1549 (in Chinese)
7. Miyoshi K, Pohlchuck B, Street K W, Zabinski J S, Sanders J H, Voevodin A A and Wu R L C 1999 Wear 225-229 65
8. Mao D S, Zhao J, Li W, Wang X, Liu X H, Zhu Y K, Fan Z, Zhou J K, Li Q and Xu J F 1999 J. Phys. D 32 1570
9. Mao D S, Zhao J, Li W, Liu X H, Zhu Y K, Fan Z, Zhou J K, Li Q and Xu J F 1999 Diamond Relat. Mater. 8 52
10. Wei Q, Sankar J, Sharma A K, Oktyabrsky S, Narayan J and Narayan R J 2000 J. Mater. Res. 15 633
11. Mao D S, Wang X, Li W, Liu X H, Li Q, Xu J F and Okano K 2000 J. Vac. Sci. Technol. B Microelectron Nanometer Struct. 18 2420
12. Wang Y X, Wen J, Tang Y Q, Guo Z, Tang H Q and Wu J X 1998 Chin. Phys. 7 589
13. Xu J, Huang X H, Li W, Wang L and Chen K J 2002 Chin. Phys. 11 502
14. Hoang N H, McKenzie D R, McFall W D and Yin Y 1996 J. Appl. Phys. 80 6279
15. Sheeja D, Tay B K, Leong K W and Lee C H 2002 Diamond Relat. Mat. 11 1643
16. Dowling D P, Donnelly K, Monclus M and McGuinness M 1998 Diamond Relat. Mat. 7 432
17. Sheeja D, Tay B K, Lau S P, Shi X, Shi J, Li Y, Ding X, Liu E and Sun Z 2000 Surf. Coat. Technol. 127 247
18. Sheeja D, Tay B K, Lau S P, Shi X and Ding X 2000 Surf. Coat. Technol. 132 228
19. Tay B K, Shi X, Tan H S, Yang H S and Sun Z 1998 Surf. Coat. Technol. 105 155
20. Lackner J M, Stotter C, Waldhauser W, Ebner R, Lenz W and Beutl M 2003 Surf. Coat. Technol. 174-175 402
21. Roth Th, Kloos K H and Broszeit E 1987 Thin Solid Films 153 123
22. Okada Morihiro 1998 Diamond Relat. Mat. 7 1308
23. Sedao, Shao T M, Mou H Q and Hua M 2005 Thin Solid Films 483 1
24. Voevodin A A and Donley M S 1996 Surf. Coat. Technol. 82 199
25. Bhushan B 1999 Handbook of Micro/Nanotribology 2nd edn. (Boca Raton, FL: CRC Press)
26. Liu Y, Erdemir A and Meletis E I 1996 Surf. Coat. Technol. 82 48