SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 100, Issue 2, 2012, Pages

Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor

(3) Zhang, Songsong a Lou, Liang a Lee, Chengkuo a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOW; AIR FLOW SENSORS; COMPATIBLE PROCESS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; FLOW SENSING; LOWER-POWER CONSUMPTION; NANO ELECTROMECHANICAL SYSTEMS; PIEZO-RESISTIVE; SILICON NANOWIRES;

AIR; NANOWIRES; NEMS; SENSORS;

NANOCANTILEVERS;

EID: 84862908325 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3675878 Document Type: Article

Times cited : (50)

References (12)

1
- 0016119303
- 10.1049/el:19740339
- A. F. P. van Putten and S. Middelhoek, Electron. Lett. 10 (21), 425 (1974). 10.1049/el:19740339
- (1974) Electron. Lett. , vol.10 , Issue.21 , pp. 425
- Van Putten, A.F.P.¹ Middelhoek, S.²

2
- 4344582223
- S. Kim, T. Nam, and S. Park, Sens. Actuators A 114 (2-3), 312 (2004).
- (2004) Sens. Actuators A , vol.114 , Issue.23 , pp. 312
- Kim, S.¹ Nam, T.² Park, S.³

3
- 62649086048
- 10.1007/s10404-008-0383-4
- Y. H. Wang, C. P. Chen, C. M. Chang, C. P. Lin, C. H. Lin, L. M. Fu, and C. Y. Lee, Microfluid. Nanofluid. 6 (3), 333 (2009). 10.1007/s10404-008-0383-4
- (2009) Microfluid. Nanofluid. , vol.6 , Issue.3 , pp. 333
- Wang, Y.H.¹ Chen, C.P.² Chang, C.M.³ Lin, C.P.⁴ Lin, C.H.⁵ Fu, L.M.⁶ Lee, C.Y.⁷

4
- 44249113872
- 10.1007/s00542-007-0458-2
- R. H. Ma, C. Y. Lee, Y. H. Wang, and H. J. Chen, Microsyst. Technol. 14 (7), 971 (2008). 10.1007/s00542-007-0458-2
- (2008) Microsyst. Technol. , vol.14 , Issue.7 , pp. 971
- Ma, R.H.¹ Lee, C.Y.² Wang, Y.H.³ Chen, H.J.⁴

5
- 79951772703
- 10.1016/j.sna.2010.01.008
- C. Song, A. R. Aiyar, S. H. Kim, and M. G. Allen, Sens. Actuators A 165 (1), 66 (2011). 10.1016/j.sna.2010.01.008
- (2011) Sens. Actuators A , vol.165 , Issue.1 , pp. 66
- Song, C.¹ Aiyar, A.R.² Kim, S.H.³ Allen, M.G.⁴

6
- 62649169617
- 10.1007/s10404-008-0381-6
- C. Y. Lee, C. Y. Wen, H. H. Hou, R. J. Yang, C. H. Tsai, and L. M. Fu, Microfluid. Nanofluid. 6 (3), 363 (2009). 10.1007/s10404-008-0381-6
- (2009) Microfluid. Nanofluid. , vol.6 , Issue.3 , pp. 363
- Lee, C.Y.¹ Wen, C.Y.² Hou, H.H.³ Yang, R.J.⁴ Tsai, C.H.⁵ Fu, L.M.⁶

7
- 77749335680
- D. Li, T. Zhao, Z. C. Yang, and D. C. Zhang, J. Micromech. Microeng. 20 (3), (2010).
- (2010) J. Micromech. Microeng. , vol.20 , Issue.3
- Li, D.¹ Zhao, T.² Yang, Z.C.³ Zhang, D.C.⁴

8
- 34248208452
- 10.1038/nnano.2006.53
- R. He and P. Yang, Nat. Nanotechnol. 1 (1), 42 (2006). 10.1038/nnano.2006.53
- (2006) Nat. Nanotechnol. , vol.1 , Issue.1 , pp. 42
- He, R.¹ Yang, P.²

9
- 77951034966
- 10.1021/nl9037856
- P. Neuzil, C. C. Wong, and J. Reboud, Nano Lett. 10 (4), 1248 (2010). 10.1021/nl9037856
- (2010) Nano Lett. , vol.10 , Issue.4 , pp. 1248
- Neuzil, P.¹ Wong, C.C.² Reboud, J.³

10
- 77955133241
- 10.1063/1.3463456
- T. Barwicz, L. Klein, S. J. Koestor, and H. Hamann, Appl. Phys. Lett. 97, 023110 (2010). 10.1063/1.3463456
- (2010) Appl. Phys. Lett. , vol.97 , pp. 023110
- Barwicz, T.¹ Klein, L.² Koestor, S.J.³ Hamann, H.⁴

11
- 79952715149
- 10.1166/nnl.2011.1160
- L. Lou, C. Lee, X. Y. Guo, R. K. Kotlanka, L. Shao, W.-T. Park, and D.-L. Kwong, Nanosci. Nanotechnol. Lett. 3, 230 (2011). 10.1166/nnl.2011.1160
- (2011) Nanosci. Nanotechnol. Lett. , vol.3 , pp. 230
- Lou, L.¹ Lee, C.² Guo, X.Y.³ Kotlanka, R.K.⁴ Shao, L.⁵ Park, W.-T.⁶ Kwong, D.-L.⁷

12
- 80053573320
- 10.1109/JMEMS.2011.2162488
- H. Liu, C. J. Tay, C. Quan, T. Kobayashi, and C. Lee, J. Microelectromech. Syst. 20, 1131 (2011). 10.1109/JMEMS.2011.2162488
- (2011) J. Microelectromech. Syst. , vol.20 , pp. 1131
- Liu, H.¹ Tay, C.J.² Quan, C.³ Kobayashi, T.⁴ Lee, C.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.