Microcantilever-based weather station for temperature, humidity and flow rate measurement

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 971-977

  Ma, Rong Hua ^a   Lee, Chia Yen ^b   Wang, Yu Hsiang ^b   Chen, Hao Jen ^b  

^a DEPARTMENT OF PHYSICS   (Taiwan)

^b DA YEH UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; ATMOSPHERIC HUMIDITY; CANTILEVER BEAMS; FLOW RATE; POLYIMIDES; RESISTORS; SILICON; TEMPERATURE MEASUREMENT;

HUMIDITY SENSING LAYERS; LINEAR RESISTANCE; MICROCANTILEVERS;

WEATHER FORECASTING;

EID: 44249113872     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0458-2     Document Type: Conference Paper

References (10)

1. Bakker A (2002) CMOS smart temperature sensor-an overview. Proc IEEE Sens 2002:1423-1427
2. Chatzandroulis S, Tserepi A, Goustouridis D, Normand P, Tsoukalas D (2002) Fabrication of single Si cantilevers using a dry release process and application in a capacitive-type humidity sensor. Microelectron Eng 61-62:955-961
3. Gogoi BP, Mastrangelo CH (1996) A low voltage force-balanced barometric pressure sensor. IEDM 1996:529-532
4. Lee CY, Lee GB (2003) Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation. J Micremechan Microeng 13:620-627
5. Lee CY, Lee GB (2005) Humidity sensors: a review. Sens Lett 3(1):1-14
6. Lee CY, Lee GB, Liu HH, Huang FC (2002) MEMS-based temperature control systems for PCR applications. Int J Non-linear Sci Numer Simul 3(4):215-218
7. Lee CY, Tsai CH, Chen LW, Fu LM, Chen YC (2006) Elactic-plastic modeling of heat-treated bimorph micro-cantilevers. J Microsyst Technol 12:979-986
8. Ma RH, Ho MC, Lee CY, Wang YH, Fu LM (2006) Micromachined silicon cantilever paddle for high-flow-rate sensing. Sens Mater 18(8):405-417
9. Mayer F, Haberli A, Jacobs H, Ofner G, Paul O, Balter H (1997) A single chip CMOS anemometer. IEDM 1997:895-898
10. Rittersma ZM (2002) Recent achievement in miniaturized humidity sensors-a review of transduction techniques. Sens Actuators A 96:196-210