Design and characterization of microelectromechanical system flow sensors using silicon nanowires

Nanoscience and Nanotechnology Letters

Volumn 3, Issue 2, 2011, Pages 230-234

  Lou, Liang ^a,b   Lee, Chengkuo ^a   Xu, Xiangguo ^c   Kotlanka, Rama Krishna ^b   Shao, Lichun ^b   Park, Woo Tae ^b   Kwong, D L ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

Author keywords

Flow sensor; MEMS; Silicon nanowire

Indexed keywords

CANTILEVER STRUCTURES; FLOW SENSING; FLOW-SENSORS; FLUID-STRUCTURES; MICRO ELECTRO MECHANICAL SYSTEM; PIEZORESISTIVE TRANSDUCERS; RESISTANCE CHANGE; SILICON NANOWIRE; SILICON NANOWIRES; WATER FLOWS;

COMPOSITE MICROMECHANICS; FLOW VELOCITY; MEMS; MICROELECTROMECHANICAL DEVICES; NANOWIRES; SENSORS;

NANOCANTILEVERS;

EID: 79952715149     PISSN: 19414900     EISSN: 19414919     Source Type: Journal    
DOI: 10.1166/nnl.2011.1160     Document Type: Conference Paper

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