An ALD aluminum oxide passivated Surface Acoustic Wave sensor for early biofilm detection

Sensors and Actuators, B: Chemical

Volumn 163, Issue 1, 2012, Pages 136-145

  Kim, Young Wook ^a   Sardari, Saeed Esmaili ^a   Meyer, Mariana T ^a   Iliadis, Agis A ^a   Wu, Hsuan Chen ^a   Bentley, William E ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Aluminum oxide; Atomic layer deposition; Bacterial biofilm; Fetal Bovine Serum; Surface Acoustic Wave; ZnO passivation

Indexed keywords

ALUMINUM OXIDES; ATOMIC LAYER; BACTERIAL BIOFILM; FETAL BOVINE SERUM; SURFACE ACOUSTIC WAVE; ZNO;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; ATOMIC LAYER DEPOSITION; BIOACOUSTICS; BODY FLUIDS; COMPUTER SOFTWARE REUSABILITY; DEPOSITION; ESCHERICHIA COLI; MAMMALS; NATURAL FREQUENCIES; OXIDES; PASSIVATION; PULSED LASER DEPOSITION; SENSORS; ZINC OXIDE;

BIOFILMS;

EID: 84862832299     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.01.021     Document Type: Article

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