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Thin Solid Films

Volumn 498, Issue 1-2, 2006, Pages 146-151

A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures

(4) Chang, Ren Chuan a Chu, Sheng Yuan a Hong, Cheng Shong a,b Chuang, Yu Ting a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b CHIENKUO TECHNOLOGY UNIVERSITY (Taiwan)

Author keywords

36 YX LiTaO3; Love wave; ST cut quartz; Zinc oxide

Indexed keywords

DOPING (ADDITIVES); LITHIUM; LITHIUM COMPOUNDS; MAGNESIUM PRINTING PLATES; MAGNETRON SPUTTERING; STRUCTURE (COMPOSITION); TEMPERATURE MEASUREMENT; THIN FILMS;

36° YX-LITAO3; ELECTROMECHANICAL COUPLING COEFFICIENT; LOVE WAVE; ST-CUT QUARTZ;

ZINC OXIDE;

EID: 30944461193 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.07.065 Document Type: Conference Paper

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