The effect of a SiO2 layer on the performance of a ZnO-based SAW device for high sensitivity biosensor applications

Smart Materials and Structures

Volumn 18, Issue 11, 2009, Pages

  Chen, Xi ^a   Liu, Dali ^a   Chen, Jiansheng ^a   Wang, Guolei ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC FLOW; BIOSENSOR APPLICATIONS; ELECTRO-MECHANICAL FIELDS; ELECTROMECHANICAL COUPLING COEFFICIENTS; FULL INTEGRATION; GUIDING LAYER; HIGH SENSITIVITY; INITIAL STRESS; LOVE MODE; LOVE WAVE; MASS LOADINGS; SAW DEVICE; SI SUBSTRATES; SI SURFACES; SI TECHNOLOGY; TWO LAYERS; ZNO; ZNO SURFACE;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; BUFFER LAYERS; ELECTROMECHANICAL DEVICES; OPTICAL WAVEGUIDES; SAWING; SEMICONDUCTING ZINC COMPOUNDS; SIGNAL PROCESSING; SIGNAL TRANSDUCTION; SILICON; SILICON COMPOUNDS; ZINC OXIDE;

BIOSENSORS;

EID: 70350641856     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/18/11/115021     Document Type: Article

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