Temperature stability of ZnO-based Love wave biosensor with SiO2 buffer layer

Sensors and Actuators, A: Physical

Volumn 156, Issue 2, 2009, Pages 317-322

  Chen, Xi ^a   Liu, Dali ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Electromechanical coupling coefficient; Love wave biosensor; Mass loading sensitivity; Optimization; Phase velocity; Temperature coefficient of delay

Indexed keywords

ELECTROMECHANICAL COUPLING COEFFICIENTS; LOVE WAVE; LOVE WAVE BIOSENSOR; MASS LOADINGS; SENSITIVITY OPTIMIZATION; TEMPERATURE-COEFFICIENT OF DELAYS;

ACOUSTIC SURFACE WAVE DEVICES; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; FILM THICKNESS; OPTIMIZATION; PHASE VELOCITY; SEMICONDUCTING ZINC COMPOUNDS; SIGNAL TRANSDUCTION; SILICON COMPOUNDS; THIN FILM DEVICES; THIN FILMS; ULTRASONIC TRANSDUCERS; ZINC OXIDE;

BIOSENSORS;

EID: 71649086909     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.10.015     Document Type: Article

References (19)

1. Vellekoop M.J. Acoustic wave sensors and their technology. Ultrasonics 36 (1998) 7-14
2. Jakoby B., and Vellekoop M.J. Viscosity sensing using a Love-wave device. Sens. Actuators A 68 (1998) 275-281
3. Minunni M., Mascini M., Guilbault G., and Hock B. The quartz crystal microbalance as biosensor. A status report on its future. Anal. Lett. 28 5 (1995) 749-764
4. Ghindilis A.L., Atanasov P., Willkins M., and Willkins E. Immunosensors: electrochemical sensing and other engineering approaches. Biosens. Bioelectron. 13 1 (1998) 113-131
5. Neef A., Schäfer R., Beimfohr C., and Kämpfer P. Fluorescence based rRNA sensor systems for detection of whole cells of Saccharomonospora spp. and Thermoactinomyces spp. Biosens. Bioelectron. 18 (2003) 565-569
6. 2/Si thin film layered structures. J. Phys. D: Appl. Phys. 34 (2001) 2267-2273
7. Tomar M., Gupta V., Sreenivas K., and Mansingh A. Temperature stability of ZnO thin film SAW device on fused quartz. IEEE Trans. Dev. Mater. Reliab. 5 3 (2005) 494-500
8. 2 over layer for zero TCD SAW device applications. IEEE Ultrasonic Symp. (2001) 265-268
9. 2/Si Structure. IEEE Ultrasonic Symposium (2001) 211-214
10. 2/Si multilayer structures. IEEE Ultrasonic Symp. (2001) 325-328
11. 2/Si surface acoustic wave biosensor. Biosens. Bioelectron. 24 (2008) 313-318
12. 2/Si devices. Solid State Electron. 50 (2006) 1113-1118
13. 2/(1 0 0)Si substrates. Solid state Electron. 52 (2008) 1710-1716
14. 2/Si structure with initial stresses. J. Sound Vib. 286 (2005) 981-999
15. Jin F., Qian Z.H., Wang Z.K., and Kishimoto K. Propagation behavior of Love waves in a piezoelectric layered structure with inhomogeneous initial stress. Smart Mater. Struct. 14 (2005) 515-523
16. Qian Z., Jin F., Wang Z., and Kishimoto K. Love waves propagation in a piezoelectric layered structure with initial stresses. Acta Mech. 171 (2004) 41-57
17. Liu H., Wang Z.K., and Wang T.J. Effect of initial stress on the propagation behavior of Love waves in a layered piezoelectric structure. Int. J. Solids Struct. 38 (2001) 37-51
18. 2 layer on the performance of a ZnO-based SAW device for high sensitivity biosensor applications. Smart Mater. Struct. 18 (2009) 115021 (8 pp)
19. Jungnickel F., Chilla E., Makarov S., and Fröhlich H.-J. Coupling coefficient, temperature stability and mass sensitivity of the Rayleigh-type mode on (0 0 1) [1 1 0] AlAs/GaAs. Smart Mater. Struct. 6 (1997) 721-729