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Volumn 51, Issue 4, 2012, Pages 544-551
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Ti-incorporated ZnO films synthesized via magnetron sputtering and its optical properties
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Author keywords
Magnetron sputtering; Microstructures; Optical properties; Ti doped ZnO films
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Indexed keywords
ATOMIC FORCE MICROSCOPIES (AFM);
ATOMIC SITES;
CHEMICAL STATE;
HEXAGONAL LATTICE;
PHOTOLUMINESCENCE SPECTRUM;
RADIO FREQUENCY REACTIVE MAGNETRON SPUTTERING;
SPUTTERING POWER;
TI ATOMS;
TITANIUM ATOMS;
X RAY PHOTOELECTRON SPECTROSCOPIES (XPS);
ZN ATOMS;
ZNO FILMS;
ATOMIC FORCE MICROSCOPY;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
OPTICAL PROPERTIES;
TITANIUM;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZINC;
METALLIC FILMS;
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EID: 84862817008
PISSN: 07496036
EISSN: 10963677
Source Type: Journal
DOI: 10.1016/j.spmi.2012.02.003 Document Type: Article |
Times cited : (20)
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References (23)
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