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Applied Surface Science

Volumn 258, Issue 10, 2012, Pages 4794-4800

The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment

(5) Han, Liang a Liu, Delian a Chen, Xian b Yang, Li b Zhao, Yuqing b

a XIDIAN UNIVERSITY (China)

b XI'AN JIAOTONG UNIVERSITY (China)

Author keywords

Ar ion bombardment; Raman spectroscopy; Tetrahedral amorphous carbon; X ray photoelectron spectroscopy

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; ARGON; CARBON FILMS; DEPOSITION; MULTILAYER FILMS; PHOTOELECTRONS; PHOTONS; RAMAN SPECTROSCOPY; SURFACE MORPHOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

BOMBARDING ENERGIES; BONDING STRUCTURE; SURFACE LAYERS; TETRAHEDRAL AMORPHOUS CARBON; TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS; TETRAHEDRAL AMORPHOUS CARBON FILMS; THICK MULTILAYERS; VISIBLE RAMAN SPECTROSCOPY;

ION BOMBARDMENT;

EID: 84862800890 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2012.01.100 Document Type: Article

Times cited : (17)

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