Heat treatment of tetrahedral amorphous carbon films grown by filtered cathodic vacuum-arc technique

Diamond and Related Materials

Volumn 8, Issue 7, 1999, Pages 1328-1332

  Tay, B K ^a   Shi, X ^a   Liu, E J ^a   Tan, H S ^a   Cheah, L K ^a   Milne, W I ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Amorphous carbon; Cathodic arc; Heat treatment; Raman spectroscopy

Indexed keywords

CARBON; DIAMONDS; HARDNESS; HEAT TREATMENT; RAMAN SPECTROSCOPY; STRESSES; THERMODYNAMIC STABILITY; VACUUM APPLICATIONS;

CATHODIC VACUUM ARC TECHNIQUE; FILM THICKNESS; TETRAHEDRAL AMORPHOUS CARBON;

AMORPHOUS FILMS;

EID: 0033165338     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00133-8     Document Type: Article

References (19)

1. Aksenov I.I., Belous V.A., Padalka V.G., Khoroshikh V.M. Fiz Plazmy, Sov. J. Plasma Phys. 4:1978;425.
2. Aksenov I.I., Vakula S.I., Padalka V.G., Strelnitskii V.E., Khoroshikh V.M. Sov. Phys. Tech. Phys. 25:1980;1164.
3. Martin P.J., Filipczuk S.W., Netterfield R.P., Field J.S., Whitnall D.F., McKenzie D.R. J. Mater. Sci. Lett. 7:1988;410.
4. Martin P.J., Netterfield R.P., Kinder T.J., Descotes L. Surf. Coat. Technol. 49:1991;239.
5. McKenzie D.R., Muller D., Pailthorpe B.A. Phys. Rev. Lett. 67:1991;773.
6. Fallon P.J., Veerasamy V.S., Davis C.A., Robertson J., Amaratunga G.A.J., Milne W.I., Koskinen J. Phys. Rev. B. 48:1993;7.
7. Xu S., Tay B.K., Tan H.S., Zhong L., Tu Y.Q., Silva S.R.P., Milne W.I. J. Appl. Phys. 79:(9):1996;7234-7240.
8. Friedman T.A., McCarty K.F., Barbour J.C., Siegal M.P., Dibble D.C. Appl. Phys. Lett. 68:(12):1996;1643.
9. Tallant D.R., Parmeter J.E., Siegal M.P., Simpson R.L. Diamond Relat. Mater. 4:1995;191.
10. X. Shi, D. Flynn, B.K. Tay, H.S. Tan, Filtered cathodic arc source, PCT/GB96/00389, 20 February 1995.
11. X. Shi, M. Fulton, D. Flynn, H.S. Tan, Deposition apparatus, PCT/GB96/00390, 20 February 1995.
12. Argon A., Gupta V., Landis H., Cornie J. Mater. Sci. Eng. A. 107:1989;41.
13. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
14. Forouhi A.R., Bloomer I. Handbook of Optical Constants of Solids. vol. II:1991;151 Academic Press, New York.
15. Alterovitz S.A., Savvides N., Smith F.W., Woollam J.A. Handbook of Optical Constants of Solids. vol. II:1991;837 Academic Press, New York.
16. Roberston J., O'Reilly E.P. Phys. Rev. B. 35:1987;2946.
17. Tamor M.A., Vassell W.C. J. Appl. Phys. 76:(6):1994;3823.
18. Anders S., Ager J.W. III, Pharr G.M., Tsui T.Y., Brown I.G. Thin Solid Films. 308-309:1997;186.
19. Schwan J., Ulrich S., Batori V., Ehrhardt H., Silva S.R.P. J. Appl. Phys. 80:(1):1996;440.