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Journal of Physics Condensed Matter

Volumn 14, Issue 4, 2002, Pages 723-730

Surface structure and sputtering in amorphous carbon thin films: A tight-binding study of film deposition

(5) Cooper, N C a Fagan, M S a Goringe, C M a Marks, N A a McKenzie, D R a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ATOMS; BONDING; CARBON; COMPUTER SIMULATION; DEPOSITION; FILM GROWTH; SPUTTERING; SURFACE STRUCTURE;

ATOM-BY ATOM DEPOSITION; INCIDENT ENERGY; TETRAHEDRAL BONDING FRACTION;

THIN FILMS;

EID: 0037017253 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/14/4/307 Document Type: Article

Times cited : (28)

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