Thirty years of rotatable magnetrons

Thin Solid Films

Volumn 520, Issue 18, 2012, Pages 5833-5845

  De Gryse, R ^a   Haemers, J ^a   Leroy, W P ^a   Depla, D ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

History; Magnetron; Rotatable; Sputter deposition

Indexed keywords

BACKGROUND PRESSURE; CYLINDRICAL TARGET; DC MODE; MAGNET CONFIGURATIONS; MATERIAL INVENTORIES; PLANAR MAGNETRON; POWER DENSITIES; REACTIVE GAS; ROTATABLE; ROTATION SPEED; TARGET DESIGN; TARGET ROTATION; TWO BEAMS; UNIQUE FEATURES;

DC POWER TRANSMISSION; HISTORY; MAGNETRON SPUTTERING; MAGNETRONS; SPUTTER DEPOSITION;

DESIGN;

EID: 84862158642     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.04.065     Document Type: Review

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