Rotatable Magnetron Sputter Technology for Large Area Glass and Web CoatingZylindrische Magnetron Sputter Technologie f̈r Architekturglasbeschichtung und Web Coating

Vakuum in Forschung und Praxis

Volumn 21, Issue 3, 2009, Pages 6-13

  Blondeel, Anja ^a   Persoone, Peter ^a   De Bosselier, Wilmert ^a  

^a Bekaert sa   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COATING APPLICATION; COATING TECHNOLOGIES; COST OF OWNERSHIP; HIGH QUALITY; LARGE-AREA COATING; LARGE-AREA SUBSTRATES; LAYER PARAMETERS; MAGNETRON SPUTTER; RIGID AND FLEXIBLE SUBSTRATES; SPUTTERING TECHNOLOGY; SYSTEM THROUGHPUT; TARGET MATERIALS; TARGET TECHNOLOGY;

COATINGS; DEPOSITION; SUBSTRATES; TARGETS; TECHNOLOGY;

MAGNETRONS;

EID: 68949216305     PISSN: 0947076X     EISSN: None     Source Type: Journal    
DOI: 10.1002/vipr.200900384     Document Type: Article

References (13)

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13. th Annual Technical Conference Proceedings of the Society of Vacuum Coaters. 2007, pp. 267-272