A novel method of temperature compensation for piezoresistive microcantilever-based sensors

Review of Scientific Instruments

Volumn 83, Issue 3, 2012, Pages

  Han, Jianqiang ^a,b   Wang, Xiaofei ^a   Yan, Tianhong ^a   Li, Yan ^a   Song, Meixuan ^a  

^a CHINA JILIANG UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-CHEMICAL SENSOR; CANTILEVER BASED SENSORS; CLAMPED ENDS; IN-SITU; MICRO CANTILEVER SENSORS; MICRO-CANTILEVERS; OUTPUT VOLTAGES; PIEZO-RESISTIVE; PIEZORESISTIVE EFFECTS; PIEZORESISTOR; SURFACE STRESS MEASUREMENT; TEMPERATURE CHANGING; TEMPERATURE COMPENSATION; TEMPERATURE DEPENDENT; TEMPERATURE DRIFT COMPENSATION; TEMPERATURE DRIFTS; TEMPERATURE-COMPENSATING; WHEATSTONE BRIDGES;

BRIDGE CIRCUITS; COMPOSITE MICROMECHANICS; NANOCANTILEVERS;

SENSORS;

GELATIN;

ARTICLE; CHEMICAL ANALYSIS; CHEMISTRY; ELECTRICITY; HUMIDITY; INSTRUMENTATION; METHODOLOGY; MICROTECHNOLOGY; TEMPERATURE;

CHEMISTRY TECHNIQUES, ANALYTICAL; ELECTRICITY; GELATIN; HUMIDITY; MICROTECHNOLOGY; TEMPERATURE;

EID: 84861645824     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3690380     Document Type: Review

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