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Volumn 83, Issue 23, 2003, Pages 4839-4841
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Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
AMPLIFIERS (ELECTRONIC);
ATOMIC FORCE MICROSCOPY;
CAPACITORS;
DATA STORAGE EQUIPMENT;
HEATING EQUIPMENT;
POLYMETHYL METHACRYLATES;
RUTHENIUM COMPOUNDS;
SCANNING ELECTRON MICROSCOPY;
SILICON SENSORS;
SILICON WAFERS;
THIN FILMS;
MICROCANTILEVERS;
MICROFABRICATION;
READBACK SYSTEMS;
THERMOCLINICAL WRITING SYSTEMS;
PIEZOELECTRIC DEVICES;
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EID: 0346306314
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1633009 Document Type: Article |
Times cited : (45)
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References (12)
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