메뉴 건너뛰기




Volumn 83, Issue 23, 2003, Pages 4839-4841

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AMPLIFIERS (ELECTRONIC); ATOMIC FORCE MICROSCOPY; CAPACITORS; DATA STORAGE EQUIPMENT; HEATING EQUIPMENT; POLYMETHYL METHACRYLATES; RUTHENIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SILICON SENSORS; SILICON WAFERS; THIN FILMS;

EID: 0346306314     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1633009     Document Type: Article
Times cited : (45)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.