Design and fabrication of piezoresistive based encapsulated poly-Si cantilevers for bio/chemical sensing

Physics Procedia

Volumn 19, Issue , 2011, Pages 319-324

  Krishna, N P Vamsi ^a   Murthy, T R Srinivasa ^a   Reddy, K Jayaprakash ^a   Sangeeth, K ^a   Hegde, G M ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Coventorware; Encapsulated polysilicon; Nanotechnology; Piezoresistivity; SU 8; Surface micromachining

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; FABRICATION; FINITE ELEMENT METHOD; MICROMACHINING; NANOCANTILEVERS; NANOTECHNOLOGY; POLYCRYSTALLINE MATERIALS; POLYSILICON; PRECISION ENGINEERING; SILICON; SINGLE CRYSTALS; SUBSTRATES; SURFACE MICROMACHINING;

COVENTORWARE; FINITE ELEMENT ANALYSIS SOFTWARE; NANOMECHANICAL RESPONSE; PIEZO-RESISTIVE SENSORS; PIEZORESISTIVITY; SINGLE-CRYSTAL SILICON WAFERS; SU-8; SURFACE MICROMACHINING PROCESS;

SILICON WAFERS;

EID: 84856913345     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2011.06.168     Document Type: Conference Paper

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