On the temperature compensation of parallel piezoresistive microcantilevers in CMOS biosensor

Sensors and Actuators, B: Chemical

Volumn 129, Issue 2, 2008, Pages 678-684

  Yang, S M ^a   Chang, C ^a   Yin, T I ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Biosensors; Bridge circuit; Parallel microcantilever; Temperature effect

Indexed keywords

BRIDGE CIRCUITS; CANTILEVER BEAMS; STRESS MEASUREMENT; THERMAL EFFECTS;

BIOCHEMICAL REACTION; MICROCANTILEVERS; TEMPERATURE COMPENSATION; TEMPERATURE DRIFT; THERMAL INERTIA;

BIOSENSORS;

EID: 38949142643     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.09.069     Document Type: Article

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