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Volumn 2, Issue , 2005, Pages 1111-1114

CMP aware shuttle mask floorplanning

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; LINEAR PROGRAMMING; SIMULATED ANNEALING; TOPOGRAPHY;

EID: 84861437949     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/1120725.1120836     Document Type: Conference Paper
Times cited : (13)

References (13)
  • 1
    • 2442425210 scopus 로고    scopus 로고
    • Physical CAD changes lo incorporate design for lithography and manufacturability
    • Scheffer, L, Physical CAD changes lo incorporate design for lithography and manufacturability. Proc of ASPDACQ&n 2004).
    • (2004) Proc of ASPDACQ&n
    • Scheffer, L.1
  • 2
    • 1642433021 scopus 로고    scopus 로고
    • Effective placement of chips on a shuttle mask
    • Chen, S. and Lynn, E. C. Effective placement of chips on a shuttle mask. Proc ofSPIE, 5130 (2003), 681-688.
    • (2003) Proc of SPIE , vol.5130 , pp. 681-688
    • Chen, S.1    Lynn, E.C.2
  • 3
  • 9
    • 0035397806 scopus 로고    scopus 로고
    • Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
    • July
    • Tian, R., Wong, D. F., and Boone, R. Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability. TCAD, 20 (July 2001), 902-910.
    • (2001) TCAD , vol.20 , pp. 902-910
    • Tian, R.1    Wong, D.F.2    Boone, R.3
  • 10
    • 0036183154 scopus 로고    scopus 로고
    • Dummy feature placement for chemical-mechanical polishing uniformity in a shallow trench isolation process
    • Jan
    • Tian, R., Tang, X., and Wong, D. F. Dummy feature placement for chemical-mechanical polishing uniformity in a shallow trench isolation process. TCAD 21, (Jan 2002), 63-71.
    • (2002) TCAD , vol.21 , pp. 63-71
    • Tian, R.1    Tang, X.2    Wong, D.F.3
  • 11
    • 0036811326 scopus 로고    scopus 로고
    • Area fill synthesis for uniform layout density
    • Oct
    • Chen, Y., A.B. Kahng, G. Robins, and A. Zelikovsky. Area fill synthesis for uniform layout density. TCAD 21 (Oct 2002), 1132-1147.
    • (2002) TCAD , vol.21 , pp. 1132-1147
    • Chen, Y.1    Kahng, A.B.2    Robins, G.3    Zelikovsky, A.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.