Physical CAD changes to incorporate design for lithography and manufacturability

Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC

Volumn , Issue , 2004, Pages 768-773

  Scheffer, Louis K ^a  

^a CADENCE DESIGN SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER AIDED DESIGN; ETCHING; LIGHT; MICROPROCESSOR CHIPS; PRINTED CIRCUIT DESIGN;

PROCESSING PROBLEMS; ROUTING; SUB-MICRON PROCESSES;

LITHOGRAPHY;

EID: 2442425210     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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