Rapid fabrication of 3D terahertz split ring resonator arrays by novel single-shot direct write focused proximity field nanopatterning

Optics Express

Volumn 20, Issue 10, 2012, Pages 11097-11108

  Singer, Jonathan P ^a,b   Lee, Jae Hwang ^a,b,c   Kooi, Steven E ^b   Thomas, Edwin L ^a,b,c  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c Rice University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; LITHOGRAPHY; MASKS; MULTIPHOTON PROCESSES; PHOTORESISTS; RESONATORS;

ARBITRARY POSITIONS; ARBITRARY STRUCTURES; DIRECT-WRITE LITHOGRAPHY; MICRO-FLUIDIC DEVICES; MULTIPHOTON INTERFERENCE; PROXIMITY FIELD NANOPATTERNING; SPLIT RING RESONATOR; TIGHTLY FOCUSED LASER BEAM;

OPTICAL RESONATORS;

NANOMATERIAL;

ARTICLE; CHEMISTRY; FINITE ELEMENT ANALYSIS; INFRARED RADIATION; INSTRUMENTATION; LASER; LIGHT; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; OPTICS; PHOTON; SCANNING ELECTRON MICROSCOPY; TERAHERTZ SPECTROSCOPY; THREE DIMENSIONAL IMAGING;

FINITE ELEMENT ANALYSIS; IMAGING, THREE-DIMENSIONAL; INFRARED RAYS; LASERS; LIGHT; MATERIALS TESTING; MICROSCOPY, ELECTRON, SCANNING; NANOSTRUCTURES; NANOTECHNOLOGY; OPTICS AND PHOTONICS; PHOTONS; TERAHERTZ SPECTROSCOPY;

EID: 84861128105     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.011097     Document Type: Article

References (28)

1. S. Maruo and K. Ikuta, "Three-dimensional microfabrication by use of single-photon-absorbed polymerization," Appl. Phys. Lett. 76(19), 2656-2658 (2000).
2. G. Witzgall, R. Vrijen, E. Yablonovitch, V. Doan, and B. J. Schwartz, "Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures," Opt. Lett. 23(22), 1745-1747 (1998). (Pubitemid 128590604)
3. M. Farsari, G. Filippidis, and C. Fotakis, "Fabrication of three-dimensional structures by three-photon polymerization," Opt. Lett. 30(23), 3180-3182 (2005). (Pubitemid 43010900)
4. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3(7), 444-447 (2004).
5. L. Li, R. R. Gattass, E. Gershgoren, H. Hwang, and J. T. Fourkas, "Achieving λ/20 resolution by one-color initiation and deactivation of polymerization," Science 324(5929), 910-913 (2009).
6. M. Malinauskas, A. Zukauskas, G. Bickauskaite, R. Gadonas, and S. Juodkazis, "Mechanisms of threedimensional structuring of photo-polymers by tightly focussed femtosecond laser pulses," Opt. Express 18(10), 10209-10221 (2010).
7. K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, "Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8," Appl. Phys. Lett. 89(2), 024106 (2006).
8. M. Thiel, J. Fischer, G. von Freymann, and M. Wegener, "Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532 nm," Appl. Phys. Lett. 97(22), 221102 (2010).
9. J. Fischer, G. von Freymann, and M. Wegener, "The materials challenge in diffraction-unlimited direct-laserwriting optical lithography," Adv. Mater. (Deerfield Beach Fla.) 22(32), 3578-3582 (2010).
10. J. Scrimgeour, D. N. Sharp, C. F. Blanford, O. M. Roche, R. G. Denning, and A. J. Turberfield, "Threedimensional optical lithography for photonic microstructures," Adv. Mater. (Deerfield Beach Fla.) 18(12), 1557-1560 (2006). (Pubitemid 43979519)
11. S. Jeon, D. J. Shir, Y. S. Nam, R. Nidetz, M. Highland, D. G. Cahill, J. A. Rogers, M. F. Su, I. F. El-Kady, C. G. Christodoulou, and G. R. Bogart, "Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures," Opt. Express 15(10), 6358-6366 (2007). (Pubitemid 46752928)
12. J. P. Singer, S. E. Kooi, and E. L. Thomas, "Focused laser spike (FLaSk) annealing of photoactivated chemically amplified resists for rapid hierarchical patterning," Nanoscale 3(7), 2730-2738 (2011).
13. M. Li, K. Douki, K. Goto, X. Li, C. Coenjarts, D. M. Smilgies, and C. K. Ober, "Spatially controlled fabrication of nanoporous block copolymers," Chem. Mater. 16(20), 3800-3808 (2004).
14. H.-W. Li and W. T. S. Huck, "Ordered block-copolymer assembly using nanoimprint lithography," Nano Lett. 4(9), 1633-1636 (2004). (Pubitemid 39297436)
15. S. A. Pruzinsky and P. V. Braun, "Fabrication and characterization of two-photon polymerized features in colloidal crystals," Adv. Funct. Mater. 15(12), 1995-2004 (2005). (Pubitemid 41803174)
16. S. A. Rinne, F. Garcia-Santamaria, and P. V. Braun, "Embedded cavities and waveguides in three-dimensional silicon photonic crystals," Nat. Photonics 2(1), 52-56 (2008).
17. S. Jeon, J.-U. Park, R. Cirelli, S. Yang, C. E. Heitzman, P. V. Braun, P. J. A. Kenis, and J. A. Rogers, "Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks," Proc. Natl. Acad. Sci. U.S.A. 101(34), 12428-12433 (2004). (Pubitemid 39122040)
18. C. H. Chang, L. Tian, W. R. Hesse, H. Gao, H. J. Choi, J. G. Kim, M. Siddiqui, and G. Barbastathis, "From twodimensional colloidal self-assembly to three-dimensional nanolithography," Nano Lett. 11(6), 2533-2537 (2011).
19. M. C. George, E. C. Nelson, J. A. Rogers, and P. V. Braun, "Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks," Angew. Chem. Int. Ed. Engl. 48(1), 144-148 (2009).
20. G. Bautista, M. J. Romero, G. Tapang, and V. R. Daria, "Parallel two-photon photopolymerization of microgear patterns," Opt. Commun. 282(18), 3746-3750 (2009).
21. K. B. Fan, A. C. Strikwerda, H. Tao, R. D. Averitt, and X. Zhang, "3D stand-up metamaterials with a purely magnetic resonance at terahertz frequencies," in Mems 2010: 23rd Ieee International Conference on Micro Electro Mechanical Systems, Technical Digest, (2010) pp. 843-846.
22. D. B. Burckel, J. R. Wendt, G. A. Ten Eyck, J. C. Ginn, A. R. Ellis, I. Brener, and M. B. Sinclair, "Micrometerscale cubic unit cell 3D metamaterial layers," Adv. Mater. (Deerfield Beach Fla.) 22(44), 5053-5057 (2010).
23. J. H. Cho, M. D. Keung, N. Verellen, L. Lagae, V. V. Moshchalkov, P. Van Dorpe, and D. H. Gracias, "Nanoscale origami for 3D optics," Small 7(14), 1943-1948 (2011).
24. S. Zhang, W. Fan, B. K. Minhas, A. Frauenglass, K. J. Malloy, and S. R. J. Brueck, "Midinfrared resonant magnetic nanostructures exhibiting a negative permeability," Phys. Rev. Lett. 94(3), 037402 (2005).
25. J.-H. Lee, C.-H. Kim, Y.-S. Kim, K.-M. Ho, K. Constant, and C. H. Oh, "Three-dimensional metallic photonic crystals fabricated by soft lithography for midinfrared applications," Appl. Phys. Lett. 88(18), 181112 (2006).
26. F. Formanek, N. Takeyasu, T. Tanaka, K. Chiyoda, A. Ishikawa, and S. Kawata, "Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization," Opt. Express 14(2), 800-809 (2006). (Pubitemid 43133632)
27. J. K. Gansel, M. Thiel, M. S. Rill, M. Decker, K. Bade, V. Saile, G. von Freymann, S. Linden, and M. Wegener, "Gold helix photonic metamaterial as broadband circular polarizer," Science 325(5947), 1513-1515 (2009).
28. C. M. Soukoulis, T. Koschny, J. Zhou, M. Kafesaki, and E. N. Economou, "Magnetic response of split ring resonators at terahertz frequencies," Phys. Status Solidi, B Basic Res. 244(4), 1181-1187 (2007).