Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8

Applied Physics Letters

Volumn 89, Issue 2, 2006, Pages

  Seet, Kock Khuen ^a   Juodkazis, Saulius ^a   Jarutis, Vygandas ^a   Misawa, Hiroaki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMMUNICATION; CURING; ELECTRONS; FABRICATION; INFRARED RADIATION; PHOTOPOLYMERIZATION; THERMAL EFFECTS;

CUMULATIVE DIRECT ABSORPTION; FEMTOSECOND; FIBER COMMUNICATION WAVELENGTH; PHOTONIC CRYSTAL; UNIVERSAL SCALING;

LASERS;

EID: 33746042970     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2221499     Document Type: Article

References (19)

1. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, Opt. Lett. 21, 2023 (1996).
2. S. Juodkazis, A. V. Rode, E. G. Gamaly, S. Matsuo, and H. Misawa, Appl. Phys. B: Lasers Opt. 77, 361 (2003).
3. Q. Johnson and A. C. Mitchell, Phys. Rev. Lett. 29, 1369 (1972).
4. S.-D. Mo and W. Y. Ching, Phys. Rev. B 57, 15219 (1998).
5. S. Juodkazis, K. Nishimura, H. Misawa, T. Ebisui, R. Waki, S. Matsuo, and T. Okada, Adv. Mater. (Weinheim, Ger.) 18, 1361 (2006).
6. K. Y. Lee, N. LaBianca, S. A. Rishton, S. Zolgharnain, J. D. Gelorme, J. Shawand, and T. H.-P. Chang, J. Vac. Sci. Technol. B 13, 3012 (1995).
7. J. M. Shaw, J. D. Gelorme, N. C. LaBianca, W. E. Conley, and S. J. Holmes, IBM J. Res. Dev. 41, 81 (1997).
8. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, Nat. Mater. 3, 444 (2004).
9. K. K. Seet, V. Mizeikis, S. Matsuo, S. Juodkazis, and H. Misawa, Adv. Mater. (Weinheim, Ger.) 17, 541 (2005).
10. T. Kondo, S. Juodkazis, and H. Misawa, Appl. Phys. A: Mater. Sci. Process. A81, 1583 (2005).
11. J. V. Crivello, Annu. Rev. Mater. Sci. 13, 173 (1983).
12. R. C. Rumpf and E. G. Johnson, J. Opt. Soc. Am. A 21, 1703 (2004).
13. G. Witzgall, R. V. E. Yablonovitch, V. Doanand, and B. J. Schwartz, Opt. Lett. 23, 1745 (1998).
14. S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, and H. Misawa, Nanotechnology 16, 846 (2005).
15. M. Deubel, M. Wegener, A. Kaso, and S. John. Appl. Phys. Lett. 85, 1895 (2004).
16. E. G. Gamaly, A. V. Rode, B. L. Davies, and V. T. Tihonchuk, Phys. Plasmas 9, 949 (2002).
17. L. V. Keldysh, Zh. Eksp. Teor. Fiz. 47, 1945 (1964)
18. [Sov. Phys. Solid State 20, 1307 (1965)].
19. B. H. Ong, X. Yuan, S. Tao, and S. C. Tjin, Opt. Lett. 31, 1367 (2006).