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Volumn 18, Issue 12, 2006, Pages 1557-1560

Three-dimensional optical lithography for photonic microstructures

(6) Scrimgeour, Jan a Sharp, David N a Blanford, Christopher F a Roche, Olivia M a Denning, Robert G a Turberfield, Andrew J a

a UNIVERSITY OF OXFORD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; EMBEDDED SYSTEMS; HOLOGRAPHIC INTERFEROMETRY; IMAGE PROCESSING; LASER BEAMS; MICROSTRUCTURE; PHOTONS;

3D INTERFACE PATTERN; HOLOGRAPHIC LITHOGRAPHY; PHOTONIC MICROSTRUCTURES; PHOTONIC-CRYSTAL DEVICE;

PHOTOLITHOGRAPHY;

EID: 33745577245 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/adma.200502286 Document Type: Article

Times cited : (73)

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