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Journal of Semiconductors
Volumn 33, Issue 5, 2012, Pages
Nano-WO 3 film modified macro-porous silicon (MPS) gas sensor
Author keywords

gas sensing properties; MPS; room temperature; WO 3 MPS gas sensor
Indexed keywords

FIELD EMISSION SCANNING ELECTRON MICROSCOPES; GAS SENSING PROPERTIES; LONG TERM STABILITY; MACRO POROUS SILICON; MPS; P TYPE SEMICONDUCTOR; P-TYPE SILICON; REACTIVE MAGNETRON SPUTTERING; ROOM TEMPERATURE; SINGLE-CRYSTALLINE;
EID: 84861125183     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/33/5/054012     Document Type: Article
Times cited : (14)
References (27)
  • 1
    • 77953133718 scopus 로고    scopus 로고
    • Effect of porosity on the performance of surface modified porous silicon hydrogen sensors
    • 10.1016/j.snb.2010.03.001 0925-4005
    • Kanungo J, Saha H, Basu S 2010 Effect of porosity on the performance of surface modified porous silicon hydrogen sensors Sensors Actuators B: Chem. 147 (1) 145
    • (2010) Sensors Actuators B: Chem. , vol.147 , Issue.1 , pp. 145
    • Kanungo, J.1    Saha, H.2    Basu, S.3
  • 2
    • 79959867610 scopus 로고    scopus 로고
    • Structural considerations on multistopband mesoporous silicon rugate filters prepared for gas sensing purposes
    • 10.1364/OE.19.013291 1094-4087
    • Jalkanen T, Salonen J, Torres-Costa V, et al 2011 Structural considerations on multistopband mesoporous silicon rugate filters prepared for gas sensing purposes Opt Express 19 (14) 13291
    • (2011) Opt Express , vol.19 , Issue.14 , pp. 13291
    • Jalkanen, T.1    Salonen, J.2    Torres-Costa, V.3
  • 3
    • 69249217846 scopus 로고    scopus 로고
    • Multiparametric sensor based on DBR porous silicon for detection of ethanol gas
    • 10.1016/j.cap.2009.04.020 1567-1739
    • Kim H J, Kim Y Y, Lee K W 2010 Multiparametric sensor based on DBR porous silicon for detection of ethanol gas Current Appl Phys 10 (1) 181
    • (2010) Current Appl Phys , vol.10 , Issue.1 , pp. 181
    • Kim, H.J.1    Kim, Y.Y.2    Lee, K.W.3
  • 4
    • 50449090521 scopus 로고    scopus 로고
    • The potential of porous silicon gas sensors
    • 10.1016/j.cossms.2008.06.003 1359-0286
    • Ozdemir S, Gole J L 2007 The potential of porous silicon gas sensors Current Opinion Solid State Materials Sci. 11 (5/6) 92
    • (2007) Current Opinion Solid State Materials Sci. , vol.11 , Issue.5-6 , pp. 92
    • Ozdemir, S.1    Gole, J.L.2
  • 6
    • 0038110869 scopus 로고    scopus 로고
    • APSFET: A new, porous silicon-based gas sensing device
    • 10.1016/S0925-4005(03)00234-X 0925-4005
    • Barillaro G, Nannini A, Pieri F 2003 APSFET: a new, porous silicon-based gas sensing device Sensors Actuators B: Chem. 93 (1-3) 263
    • (2003) Sensors Actuators B: Chem. , vol.93 , Issue.1-3 , pp. 263
    • Barillaro, G.1    Nannini, A.2    Pieri, F.3
  • 7
    • 22344446118 scopus 로고    scopus 로고
    • Fabrication of a porous silicon new substrate for a high Q radio frequency integrated inductor
    • 0899-9988
    • Zhou Yi, Yang Li, Zhang Guoyan, et al 2005 Fabrication of a porous silicon new substrate for a high Q radio frequency integrated inductor Chinese J. Semiconductors 26 (6) 1182
    • (2005) Chinese J. Semiconductors , vol.26 , Issue.6 , pp. 1182
    • Yi, Z.1    Li, Y.2    Guoyan, Z.3
  • 8
    • 0742284222 scopus 로고    scopus 로고
    • Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer
    • 0899-9988
    • Zhou Jun, Wang Xiaohong, Yao Pengjun, et al 2003 Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer Chinese J. Semiconductors 24 (7) 687
    • (2003) Chinese J. Semiconductors , vol.24 , Issue.7 , pp. 687
    • Jun, Z.1    Xiaohong, W.2    Pengjun, Y.3
  • 9
    • 60249100304 scopus 로고    scopus 로고
    • Mechanical properties of porous silicon by depth-sensing nanoindentation techniques
    • 10.1016/j.tsf.2008.12.027 0040-6090
    • Fang Zhenqian, Hu Ming, Zhang Wei, et al 2009 Mechanical properties of porous silicon by depth-sensing nanoindentation techniques Thin Solid Films 517 (9) 2930
    • (2009) Thin Solid Films , vol.517 , Issue.9 , pp. 2930
    • Zhenqian, F.1    Ming, H.2    Wei, Z.3
  • 10
    • 79952636171 scopus 로고    scopus 로고
    • Bias-assisted KOH etching of macroporous silicon membranes
    • 10.1088/0960-1317/21/3/035015
    • Mathwig K, Geilhufe M, Müller F, et al 2011 Bias-assisted KOH etching of macroporous silicon membranes J. Micromechan Microeng 21 (3) 035015
    • (2011) J. Micromechan Microeng , vol.21 , Issue.3 , pp. 035015
    • Mathwig, K.1    Geilhufe, M.2    Müller, F.3
  • 11
    • 77949288237 scopus 로고    scopus 로고
    • Formation of ohmic contact by pre-annealing of shallow nanopores in macroporous silicon and its characterization
    • 10.1016/j.sse.2009.12.024 0038-1101
    • Maji S, Das R D, Jana M, et al 2010 Formation of ohmic contact by pre-annealing of shallow nanopores in macroporous silicon and its characterization Solid-State Electron 54 (5) 568
    • (2010) Solid-State Electron , vol.54 , Issue.5 , pp. 568
    • Maji, S.1    Das, R.D.2    Jana, M.3
  • 12
    • 78651283963 scopus 로고    scopus 로고
    • Macroporous photonic crystal-based vapor detectors created by doctor blade coating
    • 10.1063/1.3535977 0003-6951
    • Yang Hongta, Jiang Peng 2011 Macroporous photonic crystal-based vapor detectors created by doctor blade coating Appl Phys Lett 98 011104
    • (2011) Appl Phys Lett , vol.98 , Issue.1 , pp. 011104
    • Hongta, Y.1    Peng, J.2
  • 13
    • 79955460539 scopus 로고    scopus 로고
    • Columnar structure in porous silicon: Influence of etching time on pore dynamics and ordering
    • 10.1063/1.3561866 0021-8979
    • Nikulin A Y, Pelliccia D, Starkov V V, et al 2011 Columnar structure in porous silicon: influence of etching time on pore dynamics and ordering J. Appl Phys 109 (7) 076106
    • (2011) J. Appl Phys , vol.109 , Issue.7 , pp. 076106
    • Nikulin, A.Y.1    Pelliccia, D.2    Starkov, V.V.3
  • 14
    • 69549135463 scopus 로고    scopus 로고
    • Porous silicon for the development of capacitive microstructures
    • 10.1016/j.mee.2009.02.031 0167-9317
    • Sancho A, Arizti F, Gracia F J 2009 Porous silicon for the development of capacitive microstructures Microelectron Eng 86 (11) 2144
    • (2009) Microelectron Eng , vol.86 , Issue.11 , pp. 2144
    • Sancho, A.1    Arizti, F.2    Gracia, F.J.3
  • 15
    • 19444378409 scopus 로고    scopus 로고
    • Biocompatibility of surfaces for antibody microarrays: Design of macroporous silicon substrates
    • 10.1016/j.ab.2004.10.036 0003-2697
    • Steinhauer C, Ressine A, Marko-Varga G, et al 2005 Biocompatibility of surfaces for antibody microarrays: design of macroporous silicon substrates Analytical Biochemistry 341 (2) 204
    • (2005) Analytical Biochemistry , vol.341 , Issue.2 , pp. 204
    • Steinhauer, C.1    Ressine, A.2    Marko-Varga, G.3
  • 16
    • 77955470279 scopus 로고    scopus 로고
    • A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating
    • 10.1016/j.snb.2010.06.010 0925-4005
    • Wanga Y, Parka S, Yeowa J T W, et al 2010 A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating Sensors Actuators B: Chem. 149 (1) 136
    • (2010) Sensors Actuators B: Chem. , vol.149 , Issue.1 , pp. 136
    • Wanga, Y.1    Parka, S.2    Yeowa, J.T.W.3
  • 17
    • 77953127558 scopus 로고    scopus 로고
    • Pd sensitized porous silicon hydrogen sensor - Influence of ZnO thin film
    • 10.1016/j.snb.2010.03.044 0925-4005
    • Kanungo J, Saha H, Basu S 2010 Pd sensitized porous silicon hydrogen sensor - influence of ZnO thin film Sensors Actuators B: Chem. 147 (1) 128
    • (2010) Sensors Actuators B: Chem. , vol.147 , Issue.1 , pp. 128
    • Kanungo, J.1    Saha, H.2    Basu, S.3
  • 18
    • 78049427353 scopus 로고    scopus 로고
    • A phosphine detection matrix using nanostructure modified porous silicon gas sensors
    • 10.1016/j.snb.2010.08.016 0925-4005
    • Ozdemir S, Gole J L 2010 A phosphine detection matrix using nanostructure modified porous silicon gas sensors Sensors Actuators B: Chem. 151 (1) 274
    • (2010) Sensors Actuators B: Chem. , vol.151 , Issue.1 , pp. 274
    • Ozdemir, S.1    Gole, J.L.2
  • 19
    • 54949158175 scopus 로고    scopus 로고
    • Investigations of hydrogen sensors made of porous silicon
    • 10.1016/j.tsf.2008.08.010 0040-6090
    • Galstyan V E, Martirosyan K S, Aroutiounian V M, et al 2008 Investigations of hydrogen sensors made of porous silicon Thin Solid Films 517 (1) 239
    • (2008) Thin Solid Films , vol.517 , Issue.1 , pp. 239
    • Galstyan, V.E.1    Martirosyan, K.S.2    Aroutiounian, V.M.3
  • 20
    • 14744291192 scopus 로고    scopus 로고
    • Influence of the annealing and operating temperatures on the gas-sensing properties of RF sputtered WO3 thin-film sensors
    • 10.1016/j.snb.2004.06.009 0925-4005
    • 3 thin-film sensors Sensors Actuators B: Chem. 111/112 (2) 271
    • (2005) Sensors Actuators B: Chem. , vol.105 , Issue.2 , pp. 271
    • Stankova, M.1    Vilanova, X.2    Llobet, E.3
  • 21
    • 0038378866 scopus 로고    scopus 로고
    • Core level and valence band investigation of WO3 thin films with synchrotron radiation
    • 10.1016/S0040-6090(03)00518-2 0040-6090
    • 3 thin films with synchrotron radiation Thin Solid Films 436 (1) 9
    • (2003) Thin Solid Films , vol.436 , Issue.1 , pp. 9
    • Ottaviano, L.1    Bussolotti, F.2    Lozzi, L.3
  • 22
    • 43749084387 scopus 로고    scopus 로고
    • Fourier transform infrared spectroscopy and scanning tunneling spectroscopy of porous silicon in the presence of methanol
    • 10.1016/j.snb.2008.01.032 0925-4005
    • Razi F, Rahimi F, Irajizad A 2008 Fourier transform infrared spectroscopy and scanning tunneling spectroscopy of porous silicon in the presence of methanol Sensors Actuators B: Chem. 132 (1) 40
    • (2008) Sensors Actuators B: Chem. , vol.132 , Issue.1 , pp. 40
    • Razi, F.1    Rahimi, F.2    Irajizad, A.3
  • 23
    • 0031376282 scopus 로고    scopus 로고
    • The room temperature oxidation of porous silicon
    • 10.1016/S0169-4332(97)00385-1 0169-4332
    • Salonen J, Lehto V P, Laine E 1997 The room temperature oxidation of porous silicon Appl Surf Sci 2 (3/4) 191
    • (1997) Appl Surf Sci , vol.120 , Issue.3-4 , pp. 191
    • Salonen, J.1    Lehto, V.P.2    Laine, E.3
  • 24
    • 79955525906 scopus 로고    scopus 로고
    • NH3 sensing characteristics of nano-WO3 thin films deposited on porous silicon
    • 10.1166/jnn.2010.2815 1533-4880
    • 3 thin films deposited on porous silicon J. Nanosci Nanotechnol 10 (11) 7739
    • (2010) J. Nanosci Nanotechnol , vol.10 , Issue.11 , pp. 7739
    • Fengyun, S.1    Ming, H.2    Peng, S.3
  • 25
    • 77957274272 scopus 로고    scopus 로고
    • Microstructure characterization and NO2-sensing properties of tungsten oxide nanostructures
    • 10.1016/j.snb.2010.06.063 0925-4005
    • 2-sensing properties of tungsten oxide nanostructures Sensors Actuators B: Chem. 150 (1) 339
    • (2010) Sensors Actuators B: Chem. , vol.150 , Issue.1 , pp. 339
    • Yuxiang, Q.1    Ming, H.2    Jie, Z.3
  • 26
    • 79957828117 scopus 로고    scopus 로고
    • Effect of annealing on microstructure and NO2-sensing properties of tungsten oxide nanowires synthesized by solvothermal method
    • 10.1016/j.snb.2011.01.024 0925-4005
    • 2-sensing properties of tungsten oxide nanowires synthesized by solvothermal method Sensors Actuators B: Chem. 155 (2) 646
    • (2011) Sensors Actuators B: Chem. , vol.155 , Issue.2 , pp. 646
    • Yuxiang, Q.1    Wanjiang, S.2    Xiao, L.3
  • 27
    • 78651228580 scopus 로고    scopus 로고
    • Gas sensing characteristics of WO3 nanoplates prepared by acidification method
    • 10.1016/j.tsf.2010.10.026 0040-6090
    • 3 nanoplates prepared by acidification method Thin Solid Films 519 (6) 2020
    • (2011) Thin Solid Films , vol.519 , Issue.6 , pp. 2020
    • Kim, S.J.1    Hwang, I.S.2    Choi, J.K.3

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