Structural considerations on multistopband mesoporous silicon rugate filters prepared for gas sensing purposes

Optics Express

Volumn 19, Issue 14, 2011, Pages 13291-13305

  Jalkanen, Tero ^a,b   Salonen, Jarno ^b   Torres Costa, Vicente ^c   Fukami, Kazuhiro ^a   Sakka, Tetsuo ^a   Ogata, Yukio H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF TURKU   (Finland)

^c UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL DETECTION; DESIGN; ETHANOL; GAS DETECTORS; PASSIVATION;

ELECTROCHEMICAL ANODIZATIONS; ETHANOL VAPOR; FILTER DESIGNS; GAS SENSING; GAS SENSING APPLICATIONS; GAS SENSING PROPERTIES; MESOPOROUS SILICON; PASSIVATED STRUCTURES; POROUS SILICON SURFACES; RUGATE FILTER; SIDE-LOBE SUPPRESSION; STOPBAND; THERMAL OXIDATION; VISIBLE RANGE;

POROUS SILICON;

ALCOHOL; SILICON;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; FILTRATION; GAS; INSTRUMENTATION; PHOTOMETRY; POROSITY; TRANSDUCER;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; ETHANOL; FILTRATION; GASES; PHOTOMETRY; POROSITY; SILICON; TRANSDUCERS;

EID: 79959867610     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.013291     Document Type: Article

References (36)

1. L. T. Canham, "Silicon quantum wire array fabricated by electrochemical and chemical dissolution of wafers," Appl. Phys. Lett. 57, 1046-1048 (1990).
2. A. Halimaoui, C. Oules, G. Bomchil, A. Bsiesy, F. Gaspard, R. Herino, M. Ligeon, and F. Muller, "Electroluminescence in the visible range during anodic oxidation of porous silicon films," Appl. Phys. Lett. 59, 304-306 (1991).
3. N. Koshida and H. Koyama, "Visible electroluminescence from porous silicon," Appl. Phys. Lett. 60, 347-349 (1992).
4. C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greef, "Optical properties of porous silicon films," Thin Solid Films 125, 157-163 (1985).
5. G. Vincent, "Optical properties of porous silicon superlattices," Appl. Phys. Lett. 64, 2367-2369 (1994).
6. M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Münder, W. Theiss, M. Wernke, and P. Grosse, "Porosity superlattices: A new class of Si heterostructures," J. Phys. D. 27, 1333-1336 (1994).
7. M. G. Berger, R. Arens-Fischer, M. Thönissen, M. Krüger, S. Billat, H. Lüth, S. Hilbrich, W. Theiss, and P. Grosse, "Dielectric filters made of PS: Advanced performance by oxidation and new layer structures," Thin Solid Films 297, 237-240 (1997). (Pubitemid 127402023)
8. V. Torres-Costa and R. J. Martín-Palma, "Application of nanostructured porous silicon in the field of optics. A review," J. Mater. Sci. 45, 2823-2838 (2010).
9. I. Schechter, M. Ben-Chorin, and A. Kux, "Gas sensing properties of porous silicon," Anal. Chem. 67, 3727-3732 (1995).
10. R. B. Bjorklund, S. Zangooie, and H. Arwin, "Color changes in thin porous silicon films caused by vapor exposure," Appl. Phys. Lett. 69, 3001-3003 (1996). (Pubitemid 126593009)
11. P. A. Snow, E. K. Squire, P. St. J. Russell, and L. T. Canham, "Vapor sensing using the optical properties of porous silicon Bragg mirrors," J. Appl. Phys. 86, 1781-1784 (1999). (Pubitemid 129307235)
12. M. Arroyo-Hernández, R. J. Martín-Palma, V. Torres-Costa, and J. M. Martínez-Duart, "Porous silicon optical filters for biosensing applications," J. Non-Cryst. Solids 352, 2457-2460 (2006).
13. B. H. King, A. M. Ruminski, J. L. Snyder, and M. J. Sailor, "Optical-fiber-mounted porous silicon photonic crystals for sensing organic vapor breakthrough in activated carbon," Adv. Mater. 19, 4530-4534 (2007).
14. M. S. Salem, M. J. Sailor, K. Fukami, T. Sakka, and Y. H. Ogata, "Sensitivity of porous silicon rugate filters for chemical vapor detection," J. Appl. Phys. 103, 083516 (2008).
15. T. Jalkanen, V. Torres-Costa, J. Salonen, M. Björkqvist, E. Mäkilä, J. M. Martínez-Duart, and V.-P. Lehto, "Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors," Opt. Express 17, 5446-5456 (2009), http://www.opticsinfobase. org/oe/abstract.cfm?URI=oe-17-7-5446.
16. A. M. Ruminski, M. M. Moore, and M. J. Sailor, "Humidity- compensating sensor for volatile organic compounds using stacked porous silicon photonic crystals," Adv. Funct. Mater. 18, 3418-3426 (2008).
17. B. G. Bovard, "Rugate filter theory: An overview," Appl. Opt. 32, 5427-5442 (1993).
18. F. Cunin, T. A. Schmedake, J. R. Link, Y.Y. Li, J. Koh, S. N. Bhatia, and M. J. Sailor, "Biomolecular screening with encoded porous-silicon photonic crystals," Nat. Mater. 1, 39-41 (2002).
19. S. O. Meade, M. S. Yoon, K. H. Ahn, and M. J. Sailor, "Porous silicon photonic crystals as encoded microcarriers," Adv. Mater. 16, 1811-1814 (2004).
20. E. Lorenzo, C. J. Oton, N. E. Capuj, M. Ghulinyan, D. Navarro-Urrios, Z. Gaburro, and L. Pavesi, "Porous siliconbased rugate filters," Appl. Opt. 44, 5415-5421 (2005).
21. N. Ishikura, M. Fujii, K. Nishida, S. Hayashi, and J. Diener, "Dichroic rugate filters based on birefringent porous silicon," Opt. Express 16, 15531-15539 (2008), http://www.opticsinfobase.org/oe/abstract.cfm? URI=oe-16-20-15531.
22. W. H. Southwell and R. L. Hall, "Rugate filter sidelobe suppression using quintic and rugated quintic matching layers," Appl. Opt. 28, 2949-2951 (1989).
23. W. H. Southwell, "Using apodization functions to reduce sidelobes in rugate filters," Appl. Opt. 28, 5091-5094 (1989).
24. H. A. Abu-Safia, A. I. Al-Sharif, and I. O. Abu Aljarayesh, "Rugate filter sidelobe suppression using halfapodization," Appl. Opt. 32, 4831-4835 (1993).
25. V. Torres-Costa, R. J. Martín-Palma, and J. M. Martínez-Duart, "Optical constants of porous silicon films and multilayers determined by genetic algorithms," J. Appl. Phys. 96, 4197-4203 (2004).
26. M. S. Salem, M. J. Sailor, T. Sakka, and Y. H. Ogata, "Electrochemical preparation of a rugate filter in silicon and its deviation from the ideal structure," J. Appl. Phys. 101, 063503 (2007).
27. H. A. MacLeod, Thin-film Optical Filters, 2nd. ed. (Adam Hilger Ltd., 1986).
28. M. Kildemo, O. Hunderi, and B. Drévillon, "Approximation of reflection coefficients for rapid real-time calculation of inhomogenous films," J. Opt. Soc. Am. A 14, 931-939 (1997). (Pubitemid 127579215)
29. J. Salonen, K. Saarinen, J. Peura, J. Viinikanoja, I. Salomaa, E. Laine, and J. Kauppinen, "Dispersive Fourier transform spectroscopy of free-standing porous silicon films," Mater. Res. Soc. Symp. Proc. 486, 323-327, (1998).
30. T. Jalkanen, J. Tuura, E. Mäkilä, and J. Salonen, "Electro-optical porous silicon gas sensor with enhanced selectivity," Sens. Actuators B 147, 100-104 (2010).
31. J. Salonen, V.-P. Lehto, and E. Laine, "Thermal oxidation of free-standing porous silicon films," Appl. Phys. Lett. 70, 637-639 (1997). (Pubitemid 127638735)
32. W. H. Southwell, "Graded-index antireflection coatings," Opt. Lett. 8, 584-586 (1983).
33. S. Ilias, T. Böcking, K. Kilian, P. J. Reece, J. Gooding, K. Gaus, and M. Gal, "Porous silicon based narrow line-width rugate filters," Opt. Mater. 29, 619-622 (2007). (Pubitemid 46038927)
34. E. Delano, "Fourier synthesis of multilayer films," J. Opt. Soc. Am. 57, 1529-1533 (1967).
35. B. G. Bovard, "Derivation of a matrix describing a rugate dielectric thin film," Appl. Opt. 27, 1998-2005 (1988).
36. B. G. Bovard, "Rugate filter design: The modified Fourier transform technique," Appl. Opt. 29, 24-30 (1990).